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1.

図書
図書
1. Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VIII : 1-3 March 1989, San Jose, California
Arnold W. Yanof, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE, c1989  viii, 388 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1089
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2.

図書
図書
2. Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California (pbk.)
Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : The Society, c1987  vi, 265 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 773
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3.

図書
図書
3. Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VII : 2-4 March 1988, Santa Clara, California (pbk.)
Arnold W. Yanof, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : The Society, c1988  vi, 307 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 923
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4.

図書
図書
4. X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York (pbk.)
Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, 1984  vi, 140 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 448
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5.

図書
図書
5. Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California (pbk.)
Phillip D. Blais, chairman/editor
出版情報: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1986  vi, 272 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 632
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