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Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology / edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; [sponsored by] Electronics and Dielectrics and Insulation Divisions

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1988

形態:

vii, 303 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 88-16 <BA01323290>

著者名:

Symposium on Process Physics and Modeling in Semiconductor Technology <DA07269423>

Srinivasan, G. R. <DA07269456>

Electrochemical Society. Electronics Division <DA0357072X>

Electrochemical Society. Dielectrics and Insulation Division <DA03570741>

Electrochemical Society. Meeting <DA03398898>

さらに 2 件

書誌ID:

BA84979904

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書誌詳細

その他の標題:	Process physics and modeling in semiconductor technology
注記:	Includes bibliographical references and indexes "... held in San Diego, California, October 19-24, 1986, and at the General Session of the ECS 170th meeting" -- on pref
主題:	Semiconductors--Mathematical models--Congresses
言語:	英語

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