Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany | 東京工業大学附属図書館蔵書検索

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Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany / Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2003

形態:

ix, 210 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5145 <BA0022700X>

著者名:

ISBN:

9780819450159 [0819450154]

書誌ID:

BC07734328

子書誌情報

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書誌詳細

その他の標題:	Metrology and inspection Microsystems engineering : metrology and inspection 3
注記:	Includes bibliographical references and author index
主題:	Interferometry--Congresses; Measurement--Congresses; Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optical detectors--Industrial applications--Congresses; Quality control--Optical methods--Congresses
言語:	英語

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