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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ, USA : Additional copies of this proceedings may be purchased from: IEEE Service Center, c1992
形態:
v, 232 p. ; 28 cm
著者名:
ISBN:
9780780307407 [0780307402] (: soft.)
9780780307414 [0780307410] (: case.)
9780780307421 [0780307429] (: micro.)
書誌ID:
BA19135020
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