| Microelectromechanical Systems |
| Introduction / Abraham Lee ; Thomas Kenny ; N. Aluru ; V. Bright ; Cetin Cetinkaya ; J. Chung ; Don DeVoe ; K. Goodson ; T. Hirano ; C. J. Kim ; L. Kin ; Jonathan Simon ; C. Wong |
| Design Methodology, Modeling and Characterization of MEMS |
| Influence of Support Compliance and Residual Stress on the Shape of Doubly-Supported Surface-Micromachined Beams / Mauro J. Kobrinsky ; Erik R. Deutsch ; Stephen D. Senturia |
| Three-Dimensional Modeling of Solder Shape for the Design of Solder Self-Assembled Micro-Electro-Mechanical Systems / Paul E. Kladitis ; Kevin F. Harsh ; Victor M. Bright ; Y. C. Lee |
| Modeling and Imaging Flexural Plate Wave Devices / D. R. Adkins ; W. K. Schubert ; M. A. Butler ; A. S. Chu |
| High-Aspect-Ratio Electroplated Structures With 2 [mu]m Beamwidth / Xiaobin Li ; Siddharth Kiyawat ; Hector J. De Los Santos ; Chang-Jin "CJ" Kim |
| Modeling and Analysis of a Tunable Bistable MEMS for Opto-Mechanical Computational Logic Elements / M. Taher ; A. Saif ; Norm R. Miller |
| Novel Micromachining Processes and Packaging for MEMS |
| Localized Deposition of Polysilicon for MEMS Post-Fabrication Processing / Daphne Joachim ; Liwei Lin |
| Sputtered Silicon for Microstructures and Microcavities / Kenneth A. Honer ; Gregory T. A. Kovacs |
| EFAB: High Aspect Ratio, Arbitrary 3-D Metal Microstructures Using a Low-Cost Automated Batch Process / Fan-Gang Tseng ; Gang Zhang ; Uri Frodis ; Adam Cohen ; Florian Mansfeld ; Peter Will |
| X-Ray Fabrication of Repetitive Structures / Yadong Liu ; Paul Sheng |
| Micro-Stereolithography of 3D Complex Ceramic Microstructures and PZT Thick Films on Si Substrate / X. N. Jiang ; C. Sun ; X. Zhang |
| MEMS and Microfluidics Poster Session |
| Nonlinear Deformation of Multilayer MEMS Structures / Martin L. Dunn ; Yanhang Zhang ; Jeffrey M. Roy ; Paul E. W. Labossiere |
| Tension Test With Single-Crystalline-Silicon Microspecimen / Taechung Yi |
| Squeeze Film Damping Effects in a Micromachined Tunneling Accelerometer / Mark G. da Silva ; Ken Greiner ; Cheng-Hsien Liu ; Thomas W. Kenny ; John R. Gilbert |
| Thermal Design and Batch Fabrication of Cantilever Probes for Scanning Thermal Microscopy / Li Shi ; Ohmyoung Kwon ; Guanghua Wu ; Arunava Majumdar |
| Residual Stress and Thickness Control of Piezoelectric Multilayer Micromirror Actuators for Initial Deflection Minimization / Myeong-Jim Kim ; Young-Ho Cho |
| A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets / Ji-Chul Ryu ; Tae Goo Kang |
| Viscous Damping of On-Substrate Torsional Micromirrors / Eung-Sam Kim ; Ki-Ho Han |
| Optical Vibration and Acceleration Sensor with a Silicon Cantilever / Mitsuteru Kimura ; Katsuhisa Toshima ; Harunobu Satoh |
| A Thermal Cycler Fabricated With Low Temperature, Co-Fired Ceramic Tapes / Jihua Zhong ; Mingqiang Yi ; Haim H. Bau |
| Meso-Scale Electromagnetic Actuators Fabricated in Low-Temperature Co-Fired Ceramic Tapes / Moon Kim ; Dennis Kim ; G. K. Ananthasuresh |
| An Analytical Solution to the Electrostatic Actuation of an Asymmetric Combdrive / J.-L. Andrew Yeh ; Norman C. Tien ; Chung-Yuen Hui |
| Modeling, Simulation and Testing of Non-Linear Resonance Behavior in MEMS Torsional Mirrors With Mechanical-Electrostatic Coupling / Noa M. Rensing ; Stuart Dodson ; George G. Adams ; Paul M. Zavracky ; Robert. W. McClelland ; Anthony Lemoncelli |
| Composition Dependent Magnetostrictive Properties of NiFe Thin Films / Lutz H. Rissing ; Hans H. Gatzen |
| Distributed Resource Allocation for Smart Matter Using Decentralized Analog Computation and Communication / Chee We Ng ; Warren B. Jackson ; Koenraad Van Schuylenbergh ; David K. Biegelsen ; Tad Hogg ; Andrew A. Berlin |
| High Performance Electrostatic Air Valves Formed by Thin-Film Lamination / Patrick Cheung ; Lars E. Swartz ; Rachel Lau |
| Assembly and Testing of Surface Micromachined, Piezoresistive Polysilicon Pressure Sensors / Todd F. Miller ; David J. Monk ; Gary O'Brien ; William P. Eaton ; James H. Smith |
| Silicon Microrelays With Optimized Electrostatic Actuator / Joachim Schimkat |
| Linear Thermomechanical Microactuators / Rebecca Cragun ; Larry L. Howell |
| Integrated LTCC Coils for Multiple Applications in Meso-Electro-Mechanical Systems / Mario Gongora-Rubio ; Jorge J. Santiago-Aviles ; Luis Sola-Laguna ; Michael Smith |
| On the Modeling of the Wheatstone-Bridge Piezoresistive Pressure Sensor: A Finite-Element-Based Approach / Chahid K. Ghaddar |
| Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone / Meng-Nian Niu ; Hong Zeng ; Hai Yan ; Eun Sok Kim |
| Design, Analysis, Fabrication, and Testing of a MEMS Contact/Bending Sensor With Improved Dynamic Range / Thieu Q. Truong ; Terrence G. Barnes ; Xiaoqing Lu ; Nicol E. McGruer |
| Controlling and Coordinating Mobile Micro-Robots: Lessons From Nature / Chris Melhuish |
| A Silicon Micromachined Valve Driven by a Bi-Stable Electromagnetic Actuator / S. Bohm ; G. J. Burger ; M. T. Korthorst ; F. Roseboom |
| Measurement of Shear Stress and Temperature Using MEMS Fabricated Sensors / Kenneth S. Breuer ; Robert L. Bayt ; Anju Nayaar |
| Modeling, Design and Fabrication of a Microdevice for E-Field Cell LYSIS / Thomas Smekal ; Cindy Briscoe ; Tony Chan ; Yung Chang ; Seth Dobrin ; Sean Gallagher ; Heidi Groninger ; Rob Marrero ; David Rhine ; Huinan Yu ; Piotr Grodzinski |
| Partly Disposable Switching and Injection Microvalves for Medical Applications / Hironobu Sato ; Shuichi Shoji ; Eipin Kim ; Keisuke Miura |
| The Fabrication of Micro Mold Inserts Using Thick Film Resist Approach / Dale Ganser ; Kathleen A. Gehoski ; David Mancini |
| PIV Analysis of Instantaneous Flow Structures in an Inkjet Printhead / Hongsheng Zhang ; Carl D. Meinhart |
| Development of Planar Microfluidic Systems Using conventional and Low Temperature Assembling Schemes for Components / Nihat Okulan ; Shekhar Bhansali ; Arum Han ; Saman Dharmatilleke ; Jin-Woo Choi ; Manoj Patel ; Kwang W. Oh ; H. Thurman Henderson ; Chong H. Ahn |
| Integrated Mixing/Reaction Micro Flow Cell for Chemical and Biochemical Applications / Ryosuke Nakamura ; Akira Yotsumoto |
| Applications of MEMS in Mechanical Engineering |
| A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration / Xinxin Li ; Rongming Lin ; Minhang Bao |
| A Stiction Study Via C-V Plot Electrostatic Actuation/Latching |
| Investigation of Micro-Scale Materials Behavior With MEMS / M. A. Haque ; M. T. A. Saif |
| Fabrication of High-Index Refractive Microlenses for Near-Field Optics / D. A. Fletcher ; K. B. Crozier ; G. S. Kino ; Calvin F. Quate ; K. E. Goodson |
| Implementation and Analysis of Polymeric Replication by Micro-Injection Molding / Jatan Shah ; Yu-Chuan Su |
| Microsensors and Microactuators |
| Design, Fabrication and Characterization of Micromirror Array for Display Application / H. Shin ; H. Ko ; Y. Yoon ; B. Choi |
| Infrared Vision Using an Uncooled Thermo-Opto-Mechanical Camera: Design, Microfabrication, and Performance / M. Mao ; T. Perazzo ; O. Kwon ; Y. Zhao ; A. Majumdar |
| Low Voltage Dual-Mass Oscillator / Christopher W. Dyck ; James J. Allen ; Robert J. Huber |
| MEMS Device Design and Fabrication |
| Characteristics of 12 [mu]m Thick Polysilicon for an Optically-Sensed Accelerometer / Y. H. Chen ; T. D. Kudrle ; N. C. Tien |
| A New Driving Principle for Micromechanical Torsional Actuators / Harald Schenk ; Peter Durr ; Detlef Kunze ; Heinz Kuck |
| Experimental and Numerical Study on Micro-Stereolithography of Ceramics |
| The Effect of Residual Stresses on the Deformation of Semi-Circular Micromachined Beams / Chingfu Tsou ; Weileun Fang |
| Design, Analysis, Fabrication, and Testing of a MEMS Flow Sensor |
| Microfluidics |
| Capillary Forces at the Interface of a MEMS Actuator / Fred K. Forster ; Chad Sager ; Taher Saif |
| Simulation of Microfluidic Systems: A New Approach Considering Capillarity / Jorg Mellmann ; Michael Sesterhenn ; Markus Lohr ; Bernard Stierle ; Tilo Strobelt ; Roland Zengerle ; Hermann Sandmaier |
| PIV Measurement of Electro-Osmotic and Pressure-Driven Flow Components in Microfluidic Systems / Eric B. Cummings |
| Actuation Methods in MicroFluidics |
| Characterization of Shear Stress Field Induced by Obliquely Impinging Airjets / Elias Panides |
| An Electrochemically Actuated Micro Dosing System With Improved Dosing Control / Sebastian Bohm ; Wouter Olthuis ; Piet Bergveld |
| Theory and Modeling of Continuous Electrowetting Microactuation / Junghoon Lee |
| Laser Opto Microactuators Rotated by Molecular Gas Dynamics Effects / Masahiro Ota ; Yu-ichi Watanabe ; Moriyoshi Sakamoto |
| Topspot: A New Method for the Fabrication of Biochips / Holger Gruhler ; Nicolaus Hey ; Martin Muller ; Stefan Bekesi ; Michael Freygang |
| MicroFluidic Components and Systems |
| Fuel Injection by a Thermal Microinjector / Yi-Kuen Lee ; Ui-Chong Yi ; Chih-Ming Ho |
| Development of a Latching Valve for Micro-Chem-LabTM / C. Channy Wong ; Douglas R. Adkins ; Ronald P. Manginell ; Gregory C. Frye-Mason ; Peter J. Hesketh ; Thomas Stanczyk |
| Fabrication of a Free Floating Silicon Gate Valve / Alexandros P. Papavasiliou ; Dorian Liepmann ; Albert P. Pisano |
| Surface Micromachine Microfluidics: Design, Fabrication, Packaging, and Characterization / Paul Galambos ; Randy Shul ; Christi Gober Willison ; Jeffry J. Sniegowski ; Samuel L. Miller ; Daniel Gutierrez |
| An Integrated Reservoir for On-Chip Aqueous Storage in Microfluidic Systems |
| Computational Approaches to Microdevice Design |
| DSMC Simulation of Microfilter Elements / Ozgur Aktas ; N. R. Aluru ; Umberto Ravaioli |
| Coupled Electrostatics-Structures-Fluidic Simulations of a Bead Mesopump / M. M. Athavale ; H. Y. Li ; H. Q. Yang ; A. J. Przekwas ; C. Cabuz ; W. Herb |
| Numerical Modeling of Electroosmotically Driven Micro Flows / Prashanta Dutta ; Ali Beskok ; Timothy C. Warburton |
| High Fidelity and Compact Models of Synthetic Jets and Their Application in Aerodynamics and Microelectronics / Andrzej J. Przekwas ; Zhijian Chen ; Marek Turowski |
| An Actively Controlled Micromixer / Marion Volpert ; Igor Mezic ; Mohammed Dahleh |
| Particulate Handling and Sensing |
| Suspension Handling System / Daniel Baechi ; Rudolf Buser |
| Dielectrophoretic Manipulation of Particles for Use in Microfluidic Devices / Robin Miles ; Phil Belgrader ; Kerry Bettencourt ; Julie Hamilton ; Shanavaz Nasarabadi |
| Transport of Particle-Laden Fluids through Fixed-Valve Micropumps / Ling-Sheng Jang ; Christopher J. Morris ; Nigel R. Sharma ; Ron Bardell |
| Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection Using Redox Cycling / Ase Richard ; Oliver Klett ; Carola Strandman ; Ylva Backlund ; Leif Nyholm |
| Theoretical and Experimental Study of Mesoscopic Impactors / Howard Hu ; K. Erickson |
| MEMS Packaging |
| Pressure Sensors in Automotive Applications and Future Challenges / D. F. Baldwin ; V. M. Bright ; J. A. Chiou ; K. W. Markus ; Q. Tan ; J. Albert Chiou |
| Characterization of Silicon/Glass Anodic Bond Initiation Toughness / Shawn J. Cunningham |
| Multiple Through-Wafer Interconnects for Stacking of Microsystems / Matthias Heschel ; Kurt Rasmussen ; Jochen F. Kuhmann ; Siebe Bouwstra |
| Near-Field Electromagnetic Shielding Effect of On-Chip Electroplated Cooper Layers / Tae-Goo Kang |
| A Technique for Determining the Mechanical Behavior and Electrical Performance of Thin Films / Li Li ; Biao Huang ; Q. Qiao ; M. H. Gordon ; W. F. Schmidt ; S. S. Ang |
| Thermal Devices and Measurements |
| Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation / Timothy Moulton |
| The Electro-Thermally Driven Micro Membrane Actuators With Two-Way Deflection / Chen Peng Hsu ; Wensyang Hsu |
| Micro-Channels with Suspended Temperature Sensors for Heat Transfer Study / Linan Jiang ; Yuelin Wang ; Man Wong ; Yitshak Zohar |
| Thermal Conductivity of Porous Silicon Layers for MEMS / Uma Srinivasan ; Peter Breh ; Mehdi Asheghi ; Maxat Touzelbaev ; Kenneth E. Goodson |
| Modeling and Prediction of Sub-Micrometer Heat Transfer During Thermomechanical Data Storage / William P. King ; Juan G. Santiago |
| Medical Application of Microsystems |
| Design and Development of a Unit-Use Cartridge for Coagulation Testing in Whole Blood / Robert S. Keynton ; Michael C. Murphy ; Rhonda Cheadle ; Andy Maczuszenko ; Cindra Widrig Opalsky |
| Biological Force Measurements Using Micromachined Cantilevers / Y. Liang ; J. N. Welch ; R. G. Rudnitsky ; T. W. Kenny |
| A Simple Silicon Based Nitric Oxide Sensor / Marcelo Bariatto-Fontes ; Rogerio Furlan ; Koiti Arakai |
| Author Index |
| Microelectromechanical Systems |
| Introduction / Abraham Lee ; Thomas Kenny ; N. Aluru ; V. Bright ; Cetin Cetinkaya ; J. Chung ; Don DeVoe ; K. Goodson ; T. Hirano ; C. J. Kim ; L. Kin ; Jonathan Simon ; C. Wong |
| Design Methodology, Modeling and Characterization of MEMS |
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