In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. | 東京工業大学附属図書館蔵書検索

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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1990

形態:

xi, 496 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 158 <BA00013775>

著者名:

ISBN:

9781558990463 [1558990461]

書誌ID:

BA10860020

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and indexes
主題:	Lasers--Industrial applications--Congresses; Plasma etching--Congresses; Semiconductor doping--Congresses; Semiconductors--Etching--Congresses
言語:	英語

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