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Proceedings of the Symposium on Patterning Science and Technology / edited by Robert Gleason, George J. Hefferon, L.K. White ; [sponsored by the] Dielectrics and Insulation and Electronics divisions and Luminescence and Display Materials Group

資料種別:

図書

出版情報:

Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, c1990

形態:

vii, 248 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 90-1 <BA01323290>

著者名:

Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)

Gleason, Robert

Hefferon, George J.

Electrochemical Society. Dielectrics and Insulation Division

Electrochemical Society. Electronics Division

Electrochemical Society. Luminescence and Display Materials Group

さらに 2 件

書誌ID:

BA11132506

子書誌情報

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書誌詳細

注記:	Spine title: Patterning science and technology "The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--P. iii Includes bibliographical references and indexes
主題:	Masks (Electronics)--Congresses; Microelectronics--Congresses; Microlithography--Congresses; Photoresists--Congresses
言語:	英語

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