所蔵情報QRコード
Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo ... [et al.] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ (10 South Main St., Pennington 08534-2896) : Electrochemical Society, c1990
- 形態:
- x, 399 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 90-9 <BA01323290>
- 著者名:
- 書誌ID:
- BA11868447
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Cleaning and surface conditioning technology in semiconductor device manufacturing 10 (: CD-ROM)
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