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1.

図書

図書
Symposium on VLSI Technology ; IEEE Electron Devices Society ; 応用物理学会
出版情報: Tokyo : Business Center for Academic Societies Japan , Piscataway, NJ : IEEE Service Center , [Tokyo] : Japan Society of Applied Physics, c1982  122 p. ; 28 cm
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2.

図書

図書
Symposium on VLSI Technology ; IEEE Electron Devices Society ; 応用物理学会
出版情報: Tokyo : Business Center for Academic Societies Japan , Piscataway, NJ : IEEE Service Center , [Tokyo] : Japan Society of Applied Physics, c1983  118 p. ; 28 cm
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3.

図書

図書
Symposium on VLSI Technology ; 応用物理学会 ; IEEE Electron Devices Society
出版情報: Tokyo : Business Center for Academic Societies Japan , Piscataway, NJ : IEEE Service Center , [Tokyo] : Japan Society of Applied Physics, c1984  94 p. ; 28 cm
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4.

図書

図書
Symposium on VLSI Technology ; 応用物理学会 ; IEEE Electron Devices Society
出版情報: Tokyo : Business Center for Academic Societies Japan , Piscataway, NJ : IEEE Service Center , [Tokyo] : Japan Society of Applied Physics, c1985  122 p. ; 28 cm
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5.

図書

図書
the IEEE Electron Devices Society, the Japan Society of Applied Physics
出版情報: Tokyo : Business Center for Academic Societies Japan , Piscataway, NJ : IEEE Service Center , [Tokyo] : Japan Society of Applied Physics, c1986  90 p. ; 28 cm
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6.

図書

図書
sponsored by the Japan Society of Applied Physics ; in cooperation with the Institute of Electronics, Information and Communication Engineers of Japan ... [et al.]
出版情報: Tokyo, Japan : Business Center for Academic Societies Japan, c1988  ix, 679 p. ; 31 cm.
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7.

図書

図書
Hiroaki [i.e. Hiraoki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan
出版情報: Bellingham, Wash., USA : SPIE, c2000  xv, 750 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4066
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8.

図書

図書
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; supported by Yokohama City
出版情報: Bellingham, Wash. : SPIE, c2001  xv, 738 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4409
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9.

図書

図書
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, the Japan Society of Applied Physics ... [et al.] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2001  xxx, 918 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4754
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10.

図書

図書
Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2003  xxi, 1066 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5130
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