Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas | 東京工業大学附属図書館蔵書検索

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Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas / Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1997

形態:

ix, 310 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3223 <BA0022700X>

著者名:

ISBN:

9780819426550 [0819426555]

書誌ID:

BA61051858

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographical references and index
主題:	Electromechanical devices--Design and construction--Congresses; Microfabrication--Congresses; Micromachining--Congresses
言語:	English, Old (ca. 450-1100)

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