Introduction to Surface Texture Measurement / Richard Leach1: |
Surface Texture Measurement / 1.1: |
Surface Profile and Areal Measurement / 1.2: |
Areal Surface Texture Measurement / 1.3: |
Surface Texture Standards and GPS / 1.4: |
Profile Standards / 1.4.1: |
Areal Specification Standards / 1.4.2: |
Instrument Types in the ISO 25178 Series / 1.5: |
The Stylus Instrument / 1.5.1: |
Scanning Probe Microscopes / 1.5.2: |
Scanning Electron Microscopes / 1.5.3: |
Optical Instrument Types / 1.5.4: |
Considerations When Choosing a Method / 1.6: |
Acknowledgements |
References |
Some Common Terms and Definitions / 2: |
Introduction / 2.1: |
The Principal Aberrations / 2.2: |
Objective Lenses / 2.3: |
Magnification and Numerical Aperture / 2.4: |
Spatial Resolution / 2.5: |
Optical Spot Size / 2.6: |
Field of View / 2.7: |
Depth of Field and Depth of Focus / 2.8: |
Interference Objectives / 2.9: |
Limitations of Optical 3D Sensors / Gerd Häusler ; Svenja Ettl3: |
Introduction: What Is This Chapter About? / 3.1: |
The Canonical Sensor / 3.2: |
Optically Rough and Smooth Surfaces / 3.3: |
Type I Sensors: Triangulation / 3.4: |
Type II and Type III Sensors: Interferometry / 3.5: |
Type IV Sensors: Deflectometry / 3.6: |
Only Four Sensor Principles? / 3.7: |
Conclusion and Open Questions / 3.8: |
Calibration of Optical Surface Topography Measuring Instruments / Claudiu Giusca4: |
Introduction to Calibration and Traceability / 4.1: |
Calibration of Surface Topography Measuring Instruments / 4.2: |
Can an Optical Instrument Be Calibrated? / 4.3: |
Types of Material Measure / 4.4: |
Calibration of Instrument Scales / 4.5: |
Noise / 4.5.1: |
Residual Flatness / 4.5.2: |
Amplification, Linearity and Squareness of the Scales / 4.5.3: |
Resolution / 4.5.4: |
Relationship between the Calibration, Adjustment and Measurement Uncertainty / 4.6: |
Summary / 4.7: |
Chromatic Confocal Microscopy / François Blateyron5: |
Basic Theory / 5.1: |
Confocal Setting / 5.1.1: |
Axial Chromatic Dispersion / 5.1.2: |
Spectral Decoding / 5.1.3: |
Height Detection / 5.1.4: |
Metrological Characteristics / 5.1.5: |
Spot Size / 5.1.5.1: |
Instrumentation / 5.2: |
Lateral Scanning Configurations / 5.2.1: |
Profile Measurement / 5.2.1.1: |
Areal Measurement / 5.2.1.2: |
Optoelectronic Controller / 5.2.2: |
Optical Head / 5.2.3: |
Light Source / 5.2.4: |
Chromatic Objective / 5.2.5: |
Spectrometer / 5.2.6: |
Optical Fibre Cord / 5.2.7: |
Instrument Use and Good Practice / 5.3: |
Calibration / 5.3.1: |
Calibration of Dark Level / 5.3.1.1: |
Linearisation of the Response Curve / 5.3.1.2: |
Calibration of the Height Amplification Coefficient / 5.3.1.3: |
Calibration of the Lateral Amplification Coefficient / 5.3.1.4: |
Calibration of the Hysteresis in Bi-directional Measurement / 5.3.1.5: |
Preparation for Measurement / 5.3.2: |
Pre-processing / 5.3.3: |
Limitations of the Technique / 5.4: |
Local Slopes / 5.4.1: |
Scanning Speed / 5.4.2: |
Light Intensity / 5.4.3: |
Non-measured Points / 5.4.4: |
Outliers / 5.4.5: |
Interference / 5.4.6: |
Ghost Foci / 5.4.7: |
Extensions of the Basic Principles / 5.5: |
Thickness Measurement / 5.5.1: |
Line and Field Sensors / 5.5.2: |
Absolute Reference / 5.5.3: |
Case Studies / 5.6: |
Point Autofocus Instruments / Katsuhiro Miura ; Atsuko Nose6: |
Comparison with Roughness Material Measures / 6.1: |
Three-Dimensional Measurement of Grinding Wheel Surface Topography / 6.3.2: |
Limitations of PAI / 6.4: |
Lateral Resolution / 6.4.1: |
Vertical Resolution / 6.4.2: |
The Maximum Acceptable Local Surface Slope / 6.4.3: |
Conclusion / 6.5: |
Focus Variation Instruments / Franz Helmli7: |
How Does It Work? / 7.1: |
Acquisition of Image Data / 7.2.2: |
Measurement of 3D Information / 7.2.3: |
Post-processing / 7.2.4: |
Handling of Invalid Points / 7.2.5: |
Difference to Other Techniques / 7.3: |
Difference to Imaging Confocal Microscopy / 7.3.1: |
Difference to Point Auto Focusing Techniques / 7.3.2: |
Optical System / 7.4: |
CCD Sensor / 7.4.2: |
Microscope Objective / 7.4.3: |
Driving Unit / 7.4.5: |
Practical Instrument Realisation / 7.4.6: |
Limitations of the Technology / 7.5: |
Translucent Materials / 7.6.1: |
Measurable Surfaces / 7.6.2: |
Repeatability Information / 7.7: |
High Radiometric Data Acquisition / 7.7.2: |
2D Alignment / 7.7.3: |
3D Alignment / 7.7.4: |
Surface Texture Measurement of Worn Metal Parts / 7.8: |
Form Measurement of Complex Tap Parameters / 7.8.2: |
Phase Shifting Interferometry / Peter de Groot7.9: |
Concept and Overview / 8.1: |
Principles of Surface Measurement Interferometry / 8.2: |
Phase Shifting Method / 8.3: |
Phase Unwrapping / 8.4: |
Phase Shifting Error Analysis / 8.5: |
Interferometer Design / 8.6: |
Focus / 8.7: |
Light Sources / 8.9: |
Examples of PSI Measurement / 8.10: |
Coherence Scanning Interferometry / 9: |
Terminology / 9.1: |
Typical Configurations of CSI / 9.3: |
Signal Formation / 9.4: |
Signal Processing / 9.5: |
Foundation Metrics and Height Calibration for CSI / 9.6: |
Dissimilar Materials / 9.7: |
Vibrational Sensitivity / 9.8: |
Transparent Films / 9.9: |
Examples / 9.10: |
Digital Holographic Microscopy / Tristan Colomb ; Jonas Kühn9.11: |
Acquisition / 10.1: |
Reconstruction / 10.2.2: |
Digital Camera / 10.3: |
Optical Path Retarder / 10.3.3: |
Digital Focusing / 10.4: |
DHM Parameters / 10.4.2: |
Automatic Working Distance in Reflection DHM / 10.4.3: |
Sample Preparation and Immersion Liquids / 10.4.4: |
Limitations of DHM / 10.5: |
Parasitic Interferences and Statistical Noise / 10.5.1: |
Height Measurement Range / 10.5.2: |
Sample Limitation / 10.5.3: |
Extensions of the Basic DHM Principles / 10.6: |
Multi-wavelength DHM / 10.6.1: |
Extended Measurement Range / 10.6.1.1: |
Mapping / 10.6.1.2: |
Stroboscopic Measurement / 10.6.2: |
DHM Reflectometry / 10.6.3: |
Infinite Focus / 10.6.4: |
Applications of DHM / 10.6.5: |
Topography and Defect Detection / 10.6.5.1: |
Roughness / 10.6.5.2: |
Micro-optics Characterization / 10.6.5.3: |
MEMS and MOEMS / 10.6.5.4: |
Semi-transparent Micro-structures / 10.6.5.5: |
Conclusions / 10.7: |
Imaging Confocal Microscopy / Roger Artigas11: |
Introduction to Imaging Confocal Microscopes / 11.1: |
Working Principle of an Imaging Confocal Microscope / 11.1.2: |
Metrological Algorithm / 11.1.3: |
Image Formation of a Confocal Microscope / 11.1.4: |
General Description of a Scanning Microscope / 11.1.4.1: |
Point Spread Function for the Limiting Case of an Infinitesimally Small Pinhole / 11.1.4.2: |
Pinhole Size Effect / 11.1.4.3: |
Types of Confocal Microscopes / 11.2: |
Laser Scanning Confocal Microscope Configuration / 11.2.1.1: |
Disc Scanning Confocal Microscope Configuration / 11.2.1.2: |
Programmable Array Scanning Confocal Microscope Configuration / 11.2.1.3: |
Objectives for Confocal Microscopy / 11.2.2: |
Vertical Scanning / 11.2.3: |
Motorised Stages with Optical Linear Encoders / 11.2.3.1: |
Piezoelectric Stages / 11.2.3.2: |
Comparison between Motorised and Piezoelectric Scanning Stages / 11.2.3.3: |
Location of an Imaging Confocal Microscope / 11.3: |
Setting Up the Sample / 11.3.2: |
Setting the Right Scanning Parameters / 11.3.3: |
Simultaneous Detection of Confocal and Bright Field Images / 11.3.4: |
Sampling / 11.3.5: |
Low Magnification against Stitching / 11.3.6: |
Limitations of Imaging Confocal Microscopy / 11.4: |
Maximum Detectable Slope on Smooth Surfaces / 11.4.1: |
Noise and Resolution in Imaging Confocal Microscopes / 11.4.2: |
Errors in Imaging Confocal Microscopes / 11.4.3: |
Objective Flatness Error / 11.4.3.1: |
Calibration of the Flatness Error / 11.4.3.2: |
Measurements on Thin Transparent Materials / 11.4.3.3: |
Measurement of Thin and Thick Film with Imaging Confocal Microscopy / 11.4.4: |
Thick Films / 11.5.1: |
Thin Films / 11.5.3: |
Case Study: Roughness Prediction on Steel Plates / 11.6: |
Light Scattering Methods / Theodore V. Vorburger ; Richard Silver ; Rainer Brodmann ; Boris Brodmann ; Jörg Seewig12: |
Instrumentation and Case Studies / 12.1: |
Early Developments / 12.3.1: |
Recent Developments in Instrumentation for Mechanical Engineering Manufacture / 12.3.2: |
Recent Developments in Instrumentation for Semiconductor Manufacture (Optical Critical Dimension) / 12.3.3: |
SEMI MF 1048-1109 (2009) Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering / 12.4: |
SEMI ME1392-1109 (2009) Guide for Angle-Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces / 12.4.2: |
ISO10110-8: 2010 Optics and Photonics - Preparation of Drawings for Optical Elements and Systems - Part 8: Surface Texture / 12.4.3: |
Standards for Gloss Measurement / 12.4.4: |
VDA Guideline 2009, Geometrische Produktspezifikation Oberflächenbeschaffenheit Winkelaufgelöste Streulichtmesstech-nik Definition, KenngröBen und Anwendung (Light Scattering Measurement Technique) / 12.4.5: |
Index / 12.5: |
Introduction to Surface Texture Measurement / Richard Leach1: |
Surface Texture Measurement / 1.1: |
Surface Profile and Areal Measurement / 1.2: |