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1.

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図書
1. Proceedings of the tenth International Conference "Science of Ceramics" held under the auspices of the European Ceramic Association at Berchtesgaden, Bundesrepublik Deutschland 1st-4th September, 1979
edited by H. Hausner
出版情報: [Germany] : Deutsche Keramische Gesellschaft, 1980  770 p. ; 22 cm
シリーズ名: Science of ceramics ; v. 10
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2.

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図書
2. Proceedings : Third International Conference, Security through Science and Engineering, September 23-26, 1980
editors, John S. Jackson, Klaus Fellbaum ; sponsored by Technical University Berlin ... [et al.]
出版情報: Lexington, Ky. : OES Publications, College of Engineering, University of Kentucky, c1980  313 p. ; 28 cm
シリーズ名: UKY BU ; 122
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3.

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図書
3. Analytic functions, Kozubnik 1979 : proceedings of a conference held in Kozubnik, Poland, April 19-25, 1979 (: Berlin ; : New York)
edited by J. Ławrynowicz
出版情報: Berlin ; New York : Springer-Verlag, 1980  x, 476 p. ; 25 cm
シリーズ名: Lecture notes in mathematics ; 798
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4.

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図書
4. Automata, languages and programming : seventh colloquium, Noordwijkerhout, the Netherlands, July 14-18, 1980 (: gw ; : us)
edited by J.W. de Bakker and J. van Leeuwen
出版情報: Berlin : Springer-Verlag, 1980  viii, 671 p. ; 25 cm
シリーズ名: Lecture notes in computer science ; 85
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5.

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図書
5. International Symposium on Programming : proceedings of the Fourth "Colloque International sur la Programmation" Paris, 22-24 April 1980 (: gw ; : us)
edited by B. Robinet
出版情報: Berlin : Springer-Verlag, 1980  vii, 341 p. ; 25 cm
シリーズ名: Lecture notes in computer science ; 83
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6.

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図書
6. Growth and properties of metal clusters : applications to catalysis and the photographic process : proceedings of the 32nd international meeting of the Societe de chimie physique, Villeurbanne, 24-28 September 1979
editor, Jean Bourdon
出版情報: Amsterdam : Elsevier Scientific Pub. Co., 1980  xviii, 549 p. ; 27 cm
シリーズ名: Studies in surface science and catalysis ; 4
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7.

図書
図書
7. National accounts = Comptes nationaux (1950-1978, v. 1 - 1984-1996, v. 2)
OECD Department of Economics and Statistics = Département des affaires économiques et statistiques, OCDE
出版情報: Paris : Organisation for Economic Co-operation and Developement, 1980-  v. ; 32 cm
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8.

雑誌
雑誌
8. Cretaceous research
出版情報: London ; New York : Academic Press, 1980-  v. ; 25 cm
巻次年月次: Vol. 1, no. 1 (Mar. 1980)-
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9.

雑誌
雑誌
9. Zentralblatt für Bakteriologie, Mikrobiologie, und Hygiene. 1. Abt, Originale, C, Allgemeine, angewandte, und ökologische Mikrobiologie : general, applied and ecological microbiology
出版情報: Stuttgart ; New York, [N.Y.] : G. Fischer, c1980-c1982  2 v. ; 25 cm
巻次年月次: Vol.2/1 (June 1981)-v.3/4(Nov. 1982)
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10.

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雑誌
10. Probability and mathematical statistics
Institute of Mathematics, Polish Academy of Sciences
出版情報: Wrocław : Polish Scientific Publishers, c1980-  v. ; 24 cm
巻次年月次: Vol. 1, fasc. 1 (1980)-
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11.

雑誌
雑誌
11. Historia scientiarum : international journal of the History of Science Society of Japan
the History of Science Society of Japan
出版情報: Tokyo : History of Science Society of Japan , Tokyo : 日本出版貿易 (distributor), 1980-1991  v. ; 26 cm
巻次年月次: No. 19 (Sept. 1980)-no. 42 (Mar. 1991)
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12.

雑誌
雑誌
12. Environmental technology letters
出版情報: [London] : [s.n.]  v. ; 28 cm
巻次年月次: Vol. 1, no. 1 (Jan. 1980)-v. 10, no. 12 (Dec. 1989)
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13.

雑誌
雑誌
13. Water pollution research journal of Canada. New ser
出版情報: New York ; Toronto : Pergamon Press, [c1980]-1994
巻次年月次: Vol. 15, no. 1 (1980)-v. 29, no. 4 (1994)
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14.

雑誌
雑誌
14. Architecture & comportement = Architecture & behaviour
出版情報: Saint-Saphorin, Suisse : Editions Georgi, 1980-1995  v. ; 24 cm
巻次年月次: Vol. 1, no. 1 (1980)-v. 11, no.3/4 (Dec. 1995)
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15.

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図書
15. Potential theory, Copenhagen 1979 : proceedings of a colloquium held in Copenhagen, May 14-18, 1979 (: Berlin ; : New York)
edited by C. Berg, G. Forst, and B. Fuglede
出版情報: Berlin ; New York : Springer-Verlag, 1980  vi, 319 p. ; 25 cm
シリーズ名: Lecture notes in mathematics ; 787
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16.

図書
図書
16. Geometry and differential geometry : proceedings of a conference held at the University of Haifa, Israel, March 18-23, 1979 (: Berlin ; : New York)
edited by R. Artzy and I. Vaisman
出版情報: Berlin ; New York : Springer-Verlag, 1980  vi, 443 p. ; 25 cm
シリーズ名: Lecture notes in mathematics ; 792
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17.

雑誌
雑誌
17. Mémoire de la Société mathématique de France. Nouvelle série
Société mathématique de France
出版情報: Paris : Gauthier-Villars, c1980-c1984  v. ; 24 cm
巻次年月次: No 1 (1980)-no 17 (1984)
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18.

雑誌
雑誌
18. Die Makromolekulare Chemie. Rapid communications
出版情報: Basel : Hüthig & Wepf, 1980-c1993  14 v. ; 24 cm
巻次年月次: Bd. 1 (1980)-Bd. 14, no. 12 (Dec. 1993)
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19.

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雑誌
19. World translations index
International Translations Centre ; Centre national de la recherche scientifique (France) ; National Translations Center (U.S.)
出版情報: Delft, Netherlands : International Translations Centre
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20.

図書
図書
20. Automata, languages and programming : sixth colloquium, Graz, Austria, July 16-20, 1979 (: gw ; : us)
edited by Hermann A. Maurer
出版情報: Berlin : Springer-Verlag, 1980  ix, 684 p. ; 25 cm
シリーズ名: Lecture notes in computer science ; 71
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目次情報: 続きを見る
Preface
Fabrication / Part I：
Introduction / Chapter 1：
What are MEMS? / 1.1：
Why MEMS? / 1.2：
Low cost, redundancy and disposability / 1.2.1：
Favorable scalings / 1.2.2：
How are MEMS made? / 1.3：
Roadmap and perspective / 1.4：
Essay: The Role of Surface to Volume Atoms as Magnetic Devices Miniaturize
The substrate and adding material to it / Chapter 2：
The silicon substrate / 2.1：
Silicon growth / 2.2.1：
It's a crystal / 2.2.2：
Miller indices / 2.2.3：
It's a semiconductor / 2.2.4：
Additive technique: Oxidation / 2.3：
Growing an oxide layer / 2.3.1：
Oxidation kinetics / 2.3.2：
Additive technique: Physical vapor deposition / 2.4：
Vacuum fundamentals / 2.4.1：
Thermal evaporation / 2.4.2：
Sputtering / 2.4.3：
Other additive techniques / 2.5：
Chemical vapor deposition / 2.5.1：
Electrodeposition / 2.5.2：
Spin casting / 2.5.3：
Wafer bonding / 2.5.4：
Essay: Silicon Ingot Manufacturing
Creating and transferring patterns-Photolithography / Chapter 3：
Keeping it clean / 3.1：
Photoresist / 3.3：
Positive resist / 3.3.1：
Negative resist / 3.3.2：
Working with resist / 3.4：
Applying photoresist / 3.4.1：
Exposure and pattern transfer / 3.4.2：
Development and post-treatment / 3.4.3：
Masks / 3.5：
Resolution / 3.6：
Resolution in contact and proximity printing / 3.6.1：
Resolution in projection printing / 3.6.2：
Sensitivity and resist profiles / 3.6.3：
Modeling of resist profiles / 3.6.4：
Photolithography resolution enhancement technology / 3.6.5：
Mask alignment / 3.6.6：
Permanent resists / 3.7：
Essay: Photolithography-Past, Present and Future
Creating structures-Micromachining / Chapter 4：
Bulk micromachining processes / 4.1：
Wet chemical etching / 4.2.1：
Dry etching / 4.2.2：
Surface micromachining / 4.3：
Surface micromachining processes / 4.3.1：
Problems with surface micromachining / 4.3.2：
Lift-off / 4.3.3：
Process integration / 4.4：
A surface micromachining example / 4.4.1：
Designing a good MEMS process flow / 4.4.2：
Last thoughts / 4.4.3：
Essay: Introduction to MEMS Packaging
Solid mechanics / Chapter 5：
Fundamentals of solid mechanics / 5.1：
Stress / 5.2.1：
Strain / 5.2.2：
Elasticity / 5.2.3：
Special cases / 5.2.4：
Non-isotropic materials / 5.2.5：
Thermal strain / 5.2.6：
Properties of thin films / 5.3：
Adhesion / 5.3.1：
Stress in thin films / 5.3.2：
Peel forces / 5.3.3：
Applications / Part II：
Thinking about modeling / Chapter 6：
What is modeling? / 6.1：
Units / 6.2：
The input-output concept / 6.3：
Physical variables and notation / 6.4：
Preface to the modeling chapters / 6.5：
MEMS transducers-An overview of how they work / Chapter 7：
What is a transducer? / 7.1：
Distinguishing between sensors and actuators / 7.2：
Response characteristics of transducers / 7.3：
Static response characteristics / 7.3.1：
Dynamic performance characteristics / 7.3.2：
MEMS sensors: principles of operation / 7.4：
Resistive sensing / 7.4.1：
Capacitive sensing / 7.4.2：
Piezoelectric sensing / 7.4.3：
Resonant sensing / 7.4.4：
Thermoelectric sensing / 7.4.5：
Magnetic sensing / 7.4.6：
MEMS actuators: principles of operation / 7.5：
Capacitive actuation / 7.5.1：
Piezoelectric actuation / 7.5.2：
Thermo-mechanical actuation / 7.5.3：
Thermo-electric cooling / 7.5.4：
Magnetic actuation / 7.5.5：
Signal conditioning / 7.6：
A quick look at two applications / 7.7：
RF applications / 7.7.1：
Optical applications / 7.7.2：
Piezoresistive transducers / Chapter 8：
Modeling piezoresistive transducers / 8.1：
Bridge analysis / 8.2.1：
Relating electrical resistance to mechanical strain / 8.2.2：
Device case study: Piezoresistive pressure sensor / 8.3：
Capacitive transducers / Chapter 9：
Capacitor fundamentals / 9.1：
Fixed-capacitance capacitor / 9.2.1：
Variable-capacitance capacitor / 9.2.2：
An overview of capacitive sensors and actuators / 9.2.3：
Modeling a capacitive sensor / 9.3：
Capacitive half-bridge / 9.3.1：
Conditioning the signal from the half-bridge / 9.3.2：
Mechanical subsystem / 9.3.3：
Device case study: Capacitive accelerometer / 9.4：
Piezoelectric transducers / Chapter 10：
Modeling piezoelectric materials / 10.1：
Mechanical modeling of beams and plates / 10.3：
Distributed parameter modeling / 10.3.1：
Statics / 10.3.2：
Bending in beams / 10.3.3：
Bending in plates / 10.3.4：
Case study: Cantilever piezoelectric actuator / 10.4：
Thermal transducers / Chapter 11：
Basic heat transfer / 11.1：
Conduction / 11.2.1：
Convection / 11.2.2：
Radiation / 11.2.3：
Case study: Hot-arm actuator / 11.3：
Lumped element model / 11.3.1：
Distributed parameter model / 11.3.2：
FEA model / 11.3.3：
Essay: Effect of Scale on Thermal Properties
Introduction to microfluidics / Chapter 12：
Basics of fluid mechanics / 12.1：
Viscosity and flow regimes / 12.2.1：
Entrance lengths / 12.2.2：
Basic equations of fluid mechanics / 12.3：
Conservation of mass / 12.3.1：
Conservation of linear momentum / 12.3.2：
Conservation equations at a point: Continuity and Navier-Stokes equations / 12.3.3：
Some solutions to the Navier-Stokes equations / 12.4：
Couette flow / 12.4.1：
Poiseuille flow / 12.4.2：
Electro-osmotic flow / 12.5：
Electrostatics / 12.5.1：
Ionic double layers / 12.5.2：
Navier-Stokes with a constant electric field / 12.5.3：
Electrophoretic separation / 12.6：
Essay: Detection Schemes Employed in Microfluidic Devices for Chemical Analysis
Microfabrication laboratories / Part III：
Hot-arm actuator as a hands-on case study / Chapter 13：
Overview of fabrication of hot-arm actuators / 13.2：
Cleanroom safety and etiquette / 13.3：
Experiments / 13.4：
Wet oxidation of a silicon wafer / Experiment 1：
Photolithography of sacrificial layer / Experiment 2：
Depositing metal contacts with evaporation / Experiment 3：
Wet chemical etching of aluminum / Experiment 4：
Plasma ash release / Experiment 5：
Characterization of hot-arm actuators / Experiment 6：
Notation / Appendix A：
Periodic table of the elements / Appendix B：
The complimentary error function / Appendix C：
Color chart for thermally grown silicon dioxide / Appendix D：
Glossary
Subject Index
Preface
Fabrication / Part I：
Introduction / Chapter 1：
21.

図書
図書
21. Materia medica
compiled and arranged on an English alphabetical basis by A. Sliosberg
出版情報: Amsterdam ; London ; New York : Elsevier, 1980  ix, 552 p. ; 23 cm
シリーズ名: Elsevier's dictionary of pharmaceutical science and techniques, in five languages : English, French, Italian, Spanish, German ; v. 2
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22.

図書
図書
22. International archives of photogrammetry and remote sensing = archives internationales de photogrammetrie et de teledetection = Internationales Archiv der Photogrammetrie und Fernerkundung (v. 27 : pt. B1 - v. 27 : pt. A : proceedings)
International Congress of International Society for Photogrammetry and Remote Sensing ; International Society for Photogrammetry and Remote Sensing
出版情報: Kyoto : Published by the Committee of the 16th International Congress of International Society for Photogrammetry and Remote Sensing, 198-  11 v. ; 30 cm
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23.

図書
図書
23. NATO Symposium on Applications of Human Biostereometrics : July 9-13 Juillet, 1978, Paris, France = Symposium OTAN sur les applications de la stereometrie a la biometrie humaine (pbk.)
A.M. Coblentz, R.E. Herron, editors ; sponsored by the Special Programme Panel on Human Factors
出版情報: Bellingham, Wash. : Society of Photo-Optical Instrumentation Engineers, c1980  xiv, 374 p. ; 28 cm
シリーズ名: Proceedings of the Society of Photo-Optical Instrumentation Engineers ; v. 166
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24.

図書
図書
24. 7th International Congress on the Chemistry of Cement (v. 1 - v. 4)
International Congress on the Chemistry of Cement
出版情報: Paris : Editions Septima, 1980  v. ; 28 cm
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25.

図書
図書
25. Comparison of automatic control and operational research techniques applied to large systems analysis and control : IFAC/IFORS symposium, Toulouse, France, 1979. 1st ed
editors, M.J. Pelegrin, J.H. Delmas
出版情報: Oxford ; New York : Pergamon Press, 1980  ix, 233 p. ; 30 cm
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26.

雑誌
雑誌
26. Reproduction, nutrition, développement
Institut national de la recherche agronomique
出版情報: Paris : LI̕nstitut
巻次年月次: 20 (1980)-v. 28, no. 6 (1988)
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27.

雑誌
雑誌
27. Recueil : journal of the Royal Netherlands Chemical Society
Koninklijke Nederlandse Chemische Vereniging
出版情報: Hague, Netherlands : Royal Netherlands Chemical Society, [c1980]-1996  v. ; 30 cm
巻次年月次: Vol. 99, 01 (Jan. 1980)-v. 115, 11/12 (Nov./Dec. 1996)
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28.

図書
図書
28. Climatologie de la mer : conférence internationale, Paris, 3-4 octobre 1979 = Sea climatology
Association de recherche Action des éléments (France)
出版情報: Paris : Technip, 1980  ix, 413 p. ; 24 cm
シリーズ名: Collection colloques et séminaires ; 34
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29.

図書
図書
29. Proceedings of the third international symposium on dredging technology, Bordeaux, France, 5-7 March 1980
organised and sponsored by BHRA Fluid Engineering, International Association of Dredging Companies ; editors, H. S. Stephens, C. A. Stapleton
出版情報: Cranfield : BHRA Fluid Engineering, c1980  vii, 446 p. ; 30 cm
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30.

雑誌
雑誌
30. Proceedings, graphics interface = comptes rendus
Graphics Interface ; Canadian Information Processing Society
出版情報: Ottawa : Canadian Information Processing Society  v. ; 28 cm
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