Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA | 東京工業大学附属図書館蔵書検索

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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA / Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2006

形態:

1 v. (various pagings) ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6156 <BA0022700X>

著者名:

ISBN:

9780819461995 [0819461997]

書誌ID:

BA86008316

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Defects--Analysis--Congresses; Integrated circuits--Design and construction--Congresses; Microelectronics industry--Quality control--Congresses; Quality control--Congresses; Semiconductor wafers--Defects--Analysis--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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