Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA | 東京工業大学附属図書館蔵書検索

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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA / Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2005

形態:

xxxv, 438 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5756 <BA0022700X>

著者名:

ISBN:

9780819457363 [0819457361]

書誌ID:

BA86008236

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Defects--Analysis--Congresses; Integrated circuits--Design and construction--Congresses; Microelectronics industry--Quality control--Congresses; Quality control--Congresses; Semiconductor wafers--Defects--Analysis--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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