Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA / David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : SPIE, c2000
- 形態:
- ix, 344 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4181 <BA0022700X>
- 著者名:
- ISBN:
- 9780819438423 [0819438421]
- 書誌ID:
- BA85986858
類似資料:
Electrochemical Society | |
SPIE Digital Library Proceedings | |
S.P.I.E.-- the Society of Photo-optical Instrumentation Engineers |