Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia / Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c2004
- 形態:
- xxxiv, 566 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5276 <BA0022700X>
- 著者名:
- ISBN:
- 9780819451699 [081945169X]
- 書誌ID:
- BA86012925
類似資料:
SPIE--the International Society of Optical Engineering | |
SPIE Digital Library Proceedings |
SPIE Digital Library Proceedings |