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1.

図書

図書
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
出版情報: Bellingham, Wash., USA : SPIE, c2004  xxviii, 302 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5379
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2.

図書

図書
Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
出版情報: Bellingham, Wash. : SPIE, c2005  xxxv, 438 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5756
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3.

図書

図書
Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2006  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6156
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