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1.

図書
図書
1. Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
Alexander Starikov, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2003  viii, 418 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5042
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2.

図書
図書
2. Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2002  xv, 628 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4692
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