Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA | 東京工業大学附属図書館蔵書検索

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Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA / Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2003

形態:

vii, 186 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5043 <BA0022700X>

著者名:

ISBN:

9780819448484 [0819448486]

書誌ID:

BA86002728

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Integrated circuits--Defects--Analysis--Congresses; Integrated circuits--Design and construction--Costs--Congresses; Microelectronics industry--Quality control--Congresses; Semiconductor wafers--Defects--Analysis--Congresses; Semiconductors--Design and construction--Costs--Congresses
言語:	英語

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