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1.

図書

図書
Dinesh O. Shah, editor
出版情報: Washington, D.C. : American Chemical Society, 1985  x, 502 p. ; 24 cm
シリーズ名: ACS symposium series ; 272
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2.

図書

図書
sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor
出版情報: Washington, D.C. : American Chemical Society, 1985  ix, 348 p. ; 24 cm
シリーズ名: ACS symposium series ; 290
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目次情報: 続きを見る
The Manufacture of Integrated
Circuits Application of Three Fundamental Conservation Laws Silicon
Oxidation Zone Refining of Low Prandtl Number Liquid Metals
Research Opportunities in Resist Technology
Modifications of Photoresists
Developer Concentration Effects Molecular-Beam
Epitaxy for Device Applications Ion-Implanted
Integrated Circuits Plasma-Assisted Processing Oxides and Nitrides of Germanium Group III-IV
Compound Optoelectronic Devices Advanced Device Isolation for VLSI Ternary Group III-V
Semiconductor Materials Device-Quality
Strained-Layer Superlattices Wafer Design and Characterization
The Manufacture of Integrated
Circuits Application of Three Fundamental Conservation Laws Silicon
Oxidation Zone Refining of Low Prandtl Number Liquid Metals
3.

図書

図書
S. Sourirajan, editor, Takeshi Matsuura, editor
出版情報: Washington, D.C. : American Chemical Society, 1985  xi, 508 p. ; 24 cm
シリーズ名: ACS symposium series ; 281
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