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1.

図書
図書
1. Equations of state : theories and applications
K.C. Chao, editor, Robert L. Robinson, Jr., editor
出版情報: Washington, D.C. : American Chemical Society, c1986  ix, 597 p. ; 24 cm
シリーズ名: ACS symposium series ; 300
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2.

図書
図書
2. Microelectronics processing : inorganic materials characterization
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society
出版情報: Washington, DC : American Chemical Society, 1986  x, 443 p
シリーズ名: ACS symposium series ; 295
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目次情報: 続きを見る
Analytical Approaches and Expert Systems in the Characterization of Microelectronic
Devices Electrical Characterization of Semiconductor
Materials and Devices Dopant Profiles by the Spreading Resistance Technique
SEM Techniques for Characterization of Semiconductor Materials
Semiconductor Materials Defect Diagnostics for Submicron VLSI
Technology Applications of Secondary Ion Mass Spectroscopy to Characterization of Microelectronic
Materials Applications of Auger Electron Spectroscopy in Microelectronics
X-Ray Photoelectron Spectroscopy Applied to Microelectronic Materials
Application of Neutron Depth Profiling to Microelectronic Materials
Processing Thermal-Wave Measurement of Thin Film
Thickness Characterization of Materials, Thin Films, and Interfaces by Optical Reflectance and Ellipsometric Techniques
Measurement of the Oxygen and Carbon
Content of Silicon Wafers by Fourier Transform
Spectrophotometry Application of the Raman Microprobe to Analytical Problems of Microelectronics
Characterization of GaAs by Magneto-Optical Photoluminescent Spectroscopy
Thermal-Wave Imaging in a Scanning Electron Microscope Fourier
Transform Mass Spectrometry in the Microelectronics
Service Laboratory Materials Characterization
Using Elemental and Isotope Analysis by Inductively
Coupled Plasma Mass Spectrometry (ICP-MS)
Activation Analysis of Electronics Materials
Trace Element Survey Analyses by Spark Source Mass Spectrography (SSMS)
Characterization of Components in Plasma Phosphorus
Doped Oxides Process Control of Vacuum-Deposited
Nickel-Chromium for the Fabrication of Reproducible
Thin Film Resistors Characterization of Spin-On Glass
Films as a Planarizing Dielectric Effects of Various
Chemistries on Silicon Wafer Cleaning
Monitoring of Particles in Gases
Using a Laser Counter Microelectronics Processing Problem Solving
The Synergism of Complementary Techniques
Analytical Approaches and Expert Systems in the Characterization of Microelectronic
Devices Electrical Characterization of Semiconductor
Materials and Devices Dopant Profiles by the Spreading Resistance Technique
3.

図書
図書
3. Materials degradation caused by acid rain
Robert Baoian, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry, Inc. at the 20th State-of-the-Art Symposium of the American Chemical Society, Arlington, Virginia, June 17-19, 1985
出版情報: Washington, DC : The Society, 1986  xiv, 447 p. ; 24 cm
シリーズ名: ACS symposium series ; 318
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4.

図書
図書
4. Strong metal-support interactions
R.T.K. Baker, S.J. Tauster, J.A. Dumesic, editors ; developed from a symposium sponsored by the divisions of Petroleum Chemistry, Inc., Industrial and Engineering Chemistry, and Colloid and Surface Chemistry at the 189th Meeting of the American Chemical Society, Miami Beach, Florida, April 28-May 3, 1985
出版情報: Washington, DC : The Society, 1986  x, 238 p. ; 24 cm
シリーズ名: ACS symposium series ; 298
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