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1.

図書
図書
1. Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California
Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE, 1989  x, 535 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1087
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2.

図書
図書
2. Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering (pbk.)
Monahan, Kevin M. ; Society of Photo-optical Instrumentation Engineers
出版情報: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987  vi, 329 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 775
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3.

図書
図書
3. Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California
Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE, c1988  viii, 458 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 921
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4.

図書
図書
4. Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California (pbk.)
Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester
出版情報: Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, 1985  vi, 223 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 565
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