| List of Abbreviations |
| Introduction |
| Introduction to Nanotechnology Bharat Bhushan / 1： |
| Nanotechnology - Definition and Examples / 1.1： |
| Background and Research Expenditures / 1.2： |
| Lessons from Nature (Biomimetics) / 1.3： |
| Applications in Different Fields / 1.4： |
| Various Issues / 1.5： |
| Research Training / 1.6： |
| Organization of Handbook / 1.7： |
| References |
| Nanostructures, Micro/Nanofabrication and Materials / Part A： |
| Nanomaterials Synthesis and Applications: Molecule-Based Devices / Frangisco M. Raymo2： |
| Chemical Approaches to Nanostructured Materials / 2.1： |
| Molecular Switches and Logic Gates / 2.2： |
| Solid State Devices / 2.3： |
| Conclusions and Outlook / 2.4： |
| Introduction to Carbon Nanotubes / Marc Monthioux ; Philippe Serp ; Emmanuel Flahaut ; Manitra Razafinimanana ; Christophe Laurent ; Alain Peigney ; Wolfgang Bacsa ; Jean-Marc Broto3： |
| Structure of Carbon Nanotubes / 3.1： |
| Synthesis of Carbon Nanotubes / 3.2： |
| Growth Mechanisms of Carbon Nanotubes / 3.3： |
| Properties of Carbon Nanotubes / 3.4： |
| Carbon Nanotube-Based Nano-Objects / 3.5： |
| Applications of Carbon Nanotubes / 3.6： |
| Concluding Remarks / 3.7： |
| Nanowires / Mildred S. Dresselhaus ; Yu-Ming Lin ; Oded Rabin ; Marcie R. Black ; Jing Kong ; Gene Dresselhaus4： |
| Synthesis / 4.1： |
| Characterization and Physical Properties of Nanowires / 4.2： |
| Applications / 4.3： |
| Template-Based Synthesis of Nanorod or Nanowire Arrays / Huamei (Mary) Shang ; Guozhong Cao4.4： |
| Template-Based Approach / 5.1： |
| Electrochemical Deposition / 5.2： |
| Electrophoretic Deposition / 5.3： |
| Template Filling / 5.4： |
| Converting from Reactive Templates / 5.5： |
| Summary and Concluding Remarks / 5.6： |
| Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition / Shinji Matsui6： |
| Three-Dimensional Nanostructure Fabrication / 6.1： |
| Nanoelectromechanics / 6.2： |
| Nanooptics: Brilliant Blue from a Morpho Butterfly Scale Quasi-Structure / 6.3： |
| Nanobiology / 6.4： |
| Summary / 6.5： |
| Introduction to Micro/Nanofabrication / Babak Ziaie ; Antonio Baldi ; Massood Z. Atashbar7： |
| Basic Microfabrication Techniques / 7.1： |
| MEMS Fabrication Techniques / 7.2： |
| Nanofabrication Techniques / 7.3： |
| Summary and Conclusions / 7.4： |
| Nanoimprint Lithography Helmut Schift, Anders Kristensen / 8： |
| Emerging Nanopatterning Methods / 8.1： |
| Nanoimprint Process / 8.2： |
| Tools and Materials for Nanoimprint / 8.3： |
| Conclusion and Outlook / 8.4： |
| Stamping Techniques for Micro- and Nanofabrication / Etienne Menard ; John A. Rogers9： |
| High-Resolution Stamps / 9.1： |
| Microcontact Printing / 9.2： |
| Nanotransfer Printing / 9.3： |
| Conclusions / 9.4： |
| Material Aspects of Micro- and Nanoelectromechanical Systems / Christian A. Zorman ; Mehran Mehregany10： |
| Silicon / 10.1： |
| Germanium-Based Materials / 10.2： |
| Metals / 10.3： |
| Harsh-Environment Semiconductors / 10.4： |
| Ga As, InP, and Related III-V Materials / 10.5： |
| Ferroelectric Materials / 10.6： |
| Polymer Materials / 10.7： |
| Future Trends / 10.8： |
| Complexity and Emergence as Design Principles for Engineering Decentralized Nanoscale Systems / David Wendell ; Dean Ho ; Carlo D. Montemagno11： |
| Definitions / 11.1： |
| Examples and Experimental Analysis of Decentralized Systems in Nature / 11.2： |
| Engineering Emergent Behavior into Nanoscale Systems: Thematic Examples of Synthetic Decentralized Nanostructures / 11.3： |
| Conclusion / 11.4： |
| Nanometer-Scale Thermoelectric Materials / Joseph P. Heremans12： |
| The Promise of Thermoelectricity / 12.1： |
| Theory of Thermoelectric Transport in Low-Dimensional Solids / 12.2： |
| Two-Dimensional Thermoelectric Transport in Quantum Wells / 12.3： |
| One-Dimensional Thermoelectric Transport in Quantum Wires / 12.4： |
| Quasi-Zero-Dimensional Systems, Solids Containing Quantum Dots / 12.5： |
| Nano- and Microstructured Semiconductor Materials for Macroelectronics / Yugang Sun ; Seung-Hyun Hur12.6： |
| Classes of Semiconductor Nanomaterials and their Preparation / 13.1： |
| Generation of Thin Films of Ordered Nanostructures on Plastic Substrates / 13.2： |
| Applications for Macroelectronics / 13.3： |
| Outlook / 13.4： |
| Mems/Nems and Biomems/Nems / Part B： |
| Next-Generation DNA Hybridization and Self-Assembly Nanofabrication Devices / Michael J. Heller ; Benjamin Sullivan ; Dietrich Dehlinger ; Paul Swanson ; Dalibor Hodko14： |
| Electronic Microarray Technology / 14.1： |
| Electric Field-Assisted Nanofabrication Processes / 14.2： |
| Mems/Nems Devices and Applications / Darrin J. Young14.3： |
| Mems Devices and Applications / 15.1： |
| Nanoelectromechanical Systems (Nems) / 15.2： |
| Current Challenges and Future Trends / 15.3： |
| Nanomechanical Cantilever Array Sensors / Hans Peter Lang ; Martin Hegner ; Christoph Gerber16： |
| Technique / 16.1： |
| Cantilever Array Sensors / 16.2： |
| Modes of Operation / 16.3： |
| Microfabrication / 16.4： |
| Measurement Set-Up / 16.5： |
| Functionalization Techniques / 16.6： |
| Therapeutic Nanodevices / Stephen C. Lee ; Mark Ruegsegger ; Philip D. Barnes ; Bryan R. Smith ; Mauro Ferrari16.7： |
| Definitions and Scope of Discussion / 17.1： |
| Synthetic Approaches: """"Top-Down"""" Versus """"Bottom-Up"""" Approaches for Nanotherapeutic Device Components / 17.2： |
| Technological and Biological Opportunities / 17.3： |
| Applications of Nanotherapeutic Devices / 17.4： |
| Concluding Remarks: Barriers to Practice and Prospects / 17.5： |
| G-Protein Coupled Receptors: Surface Display and Biosensor Technology / Edward J. McMurchie ; Wayne R. Leifert18： |
| The GPCR: G-Protein Activation Cycle / 18.1： |
| Preparation of GPCRs and G-proteins / 18.2： |
| Measurement of GPCR Signaling / 18.3： |
| GPCR Biosensing / 18.4： |
| Protein Engineering in GPCR Signaling / 18.5： |
| The Future of GPCRs in Nanobiotechnologies / 18.6： |
| Microfluidics and Their Applications to Lab-on-a-Chip / Jin-Woo Choi19： |
| Materials for Microfluidic Devices and Micro/Nanofabrication Techniques / 19.1： |
| Active Microfluidic Devices / 19.2： |
| Smart Passive Microfluidic Devices / 19.3： |
| Lab-on-a-Chip for Biochemical Analysis / 19.4： |
| Centrifuge-Based Fluidic Platforms / Jim Zoval ; Guangyao Jia ; Horacio Kido ; Jitae Kim ; Nahui Kim ; Marc J. Madou20： |
| Why Centripetal Force for Fluid Propulsion? / 20.1： |
| Compact Disc or Micro-Centrifuge Fluidics / 20.2： |
| CD Applications / 20.3： |
| Micro/Nanodroplets in Microfluidic Devices / """"Mike"""" Yung-Chieh Tan ; Abraham """"Abe"""" Lee20.4： |
| Active or Programmable Droplet System / 21.1： |
| Passive Droplet Control Techniques / 21.2： |
| Scanning Probe Microscopy / 21.3： |
| Scanning Probe Microscopy - Principle of Operation, Instrumentation, and Probes / Bharat Bhushan ; Othmar Marti22： |
| Scanning Tunneling Microscope / 22.1： |
| Atomic Force Microscope / 22.2： |
| AFM Instrumentation and Analyses / 22.3： |
| Probes in Scanning Microscopies Jason H. Hafner / 23： |
| Atomic Force Microscopy / 23.1： |
| Scanning Tunneling Microscopy / 23.2： |
| Noncontact Atomic Force Microscopy and Related Topics / Franz J. Giessibl ; Yasuhiro Sugawara ; Seizo Morita ; Hirotaka Hosoi ; Kazuhisa Sueoka ; Koichi Mukasa ; Akira Sasahara ; Hiroshi Onishi24： |
| Atomic Force Microscopy (AFM) / 24.1： |
| Applications to Semiconductors / 24.2： |
| Applications to Insulators / 24.3： |
| Applications to Molecules / 24.4： |
| Low-Temperature Scanning Probe Microscopy / Markus Morgenstern ; Alexander Schwarz ; Udo D. Schwarz25： |
| Microscope Operation at Low Temperatures / 25.1： |
| Instrumentation / 25.2： |
| Scanning Tunneling Microscopy and Spectroscopy / 25.3： |
| Scanning Force Microscopy and Spectroscopy / 25.4： |
| Higher-Harmonic Force Detection in Dynamic Force Microscopy / Ozgur Sahin ; Calvin F. Quate ; Olav Solgaard26： |
| Modeling of Tip-Sample Interaction Forces in Tapping-Mode AFM / 26.1： |
| Enhancing a Specific Harmonic of the Interaction Force Using a Flexural Resonance / 26.2： |
| Recovering the Time-Resolved Tip-Sample Forces with Torsional Vibrations / 26.3： |
| Application Examples / 26.4： |
| Higher Harmonic/Atomic Force Microscopy with Small Amplitudes / 26.5： |
| Dynamic Modes of Atomic Force Microscopy / A. Schirmeisen ; B. Anczykowski ; Harald Fuchs27： |
| Motivation: Measurement of a Single Atomic Bond / 27.1： |
| Harmonic Oscillator: A Model System for Dynamic AFM / 27.2： |
| Dynamic AFM Operational Modes / 27.3： |
| Q-Control / 27.4： |
| Dissipation Processes Measured with Dynamic AFM / 27.5： |
| Molecular Recognition Force Microscopy: From Simple Bonds to Complex Energy Landscapes / Peter Hinterdorfer ; Ziv Reich27.6： |
| Ligand Tip Chemistry / 28.1： |
| Immobilization of Receptors onto Probe Surfaces / 28.2： |
| Single-Molecule Recognition Force Detection / 28.3： |
| Principles of Molecular Recognition Force Spectroscopy / 28.4： |
| Recognition Force Spectroscopy: From Isolated Molecules to Biological Membranes / 28.5： |
| Recognition Imaging / 28.6： |
| Nanotribology and Nanomechanics / 28.7： |
| Nanotribology, Nanomechanics and Materials Characterization / 29： |
| Description of AFM/FFM and Various Measurement Techniques / 29.1： |
| Surface Imaging, Friction and Adhesion / 29.2： |
| Wear, Scratching, Local Deformation, and Fabrication/Machining / 29.3： |
| Indentation / 29.4： |
| Boundary Lubrication / 29.5： |
| Closure / 29.6： |
| Surface Forces and Nanorheology of Molecularly Thin Films / Marina Ruths ; Jacob N. Israelachvili30： |
| Introduction: Types of Surface Forces / 30.1： |
| Methods Used to Study Surface Forces / 30.2： |
| Normal Forces Between Dry (Unlubricated) Surfaces / 30.3： |
| Normal Forces Between Surfaces in Liquids / 30.4： |
| Adhesion and Capillary Forces / 30.5： |
| Introduction: Different Modes of Friction and the Limits of Continuum Models / 30.6： |
| Relationship Between Adhesion and Friction Between Dry (Unlubricated and Solid Boundary Lubricated) Surfaces / 30.7： |
| Liquid Lubricated Surfaces / 30.8： |
| Effects of Nanoscale Texture on Friction / 30.9： |
| Interfacial Forces and Spectroscopic Study of Confined Fluids / Y. Elaine Zhu ; Ashis Mukhopadhyay ; Steve Granick31： |
| Hydrodynamic Force of Fluids Flowing in Micro- to Nanofluidics: A Question About No-Slip Boundary Condition / 31.1： |
| Hydrophobic Interaction and Water at a Hydrophobicity Interface / 31.2： |
| Ultrafast Spectroscopic Study of Confined Fluids: Combining Ultra-Fast Spectroscopy with Force Apparatus / 31.3： |
| Contrasting Friction with Diffusion in Molecularly Thin Films / 31.4： |
| Diffusion of Confined Molecules During Shear / 31.5： |
| Scanning Probe Studies of Nanoscale Adhesion Between Solids in the Presence of Liquids and Monolayer Films / Robert W. Carpick ; James Batteas ; Maarten P.de Boer31.6： |
| The Importance of Adhesion at the Nanoscale / 32.1： |
| Techniques for Measuring Adhesion / 32.2： |
| Calibration of Forces, Displacements, and Tips / 32.3： |
| The Effect of Liquid Capillaries on Adhesion / 32.4： |
| Self-Assembled Monolayers / 32.5： |
| Friction and Wear on the Atomic Scale / Enrico Gnecco ; Roland Bennewitz ; Oliver Pfeiffer ; Anisoara Socoliuc ; Ernst Meyer32.6： |
| Friction Force Microscopy in Ultrahigh Vacuum / 33.1： |
| The Tomlinson Model / 33.2： |
| Friction Experiments on the Atomic Scale / 33.3： |
| Thermal Effects on Atomic Friction / 33.4： |
| Geometry Effects in Nanocontacts / 33.5： |
| Wear on the Atomic Scale / 33.6： |
| Molecular Dynamics Simulations of Atomic Friction and Wear / 33.7： |
| Energy Dissipation in Noncontact Atomic Force Microscopy / 33.8： |
| Velocity Dependence of Nanoscale Friction, Adhesion and Wear / Nikhil S. Tambe33.9： |
| Bridging Science and Engineering for Nanotribological Investigations / 34.1： |
| Velocity Dependence of Nanoscale Friction and Adhesion / 34.2： |
| Dominant Friction Regimes and Mechanisms / 34.4： |
| Nanoscale Friction Mapping / 34.5： |
| Wear Studies at High Sliding Velocities / 34.6： |
| Identifying Materials with Low Friction and Adhesion for Nanotechnological Applications / 34.7： |
| Computer Simulations of Nanometer-Scale Indentation and Friction / Susan B. Sinnott ; Seong-Jun Heo ; Donald W. Brenner ; Judith A. Harrison34.8： |
| Computational Details / 35.1： |
| Friction and Lubrication / 35.2： |
| Nanoscale Mechanical Properties - Measuring Techniques and Applications / Andrzej J. Kulik ; Andras Kis ; Gérard Gremaud ; Stefan Hengsberger ; Gustavo S. Luengo ; Philippe K. Zysset ; László Forró35.4： |
| Local Mechanical Spectroscopy via Dynamic Contact AFM / 36.1： |
| Static Methods - Mesoscopic Samples, Shear and Young's Modulus / 36.2： |
| Scanning Nanoindentation as a Tool to Determine Nanomechanical Properties of Biological Tissue Under Dry and Wet Conditions / 36.3： |
| General Summary and Perspectives / 36.4： |
| Nanomechanical Properties of Solid Surfaces and Thin Films / Adrian B. Mann37： |
| Data Analysis / 37.1： |
| Modes of Deformation / 37.3： |
| Thin Films and Multilayers / 37.4： |
| Developing Areas / 37.5： |
| Scale Effect in Mechanical Properties and Tribology / Michael Nosonovsky38： |
| Nomenclature / 38.1： |
| Scale Effect in Mechanical Properties / 38.2： |
| Scale Effect in Surface Roughness and Contact Parameters / 38.4： |
| Scale Effect in Friction / 38.5： |
| Scale Effect in Wear / 38.6： |
| Scale Effect in Interface Temperature / 38.7： |
| A Statistics of Particle Size Distribution / 38.8： |
| Mechanics of Biological Nanotechnology / Rob Phillips ; Prashant K. Purohit ; Jane Kondev39： |
| Science at the Biology-Nanotechnology Interface / 39.1： |
| Scales at the Bio-Nano Interface / 39.2： |
| Modeling at the Nano-Bio Interface / 39.3： |
| Nature's Nanotechnology Revealed: Viruses as a Case Study / 39.4： |
| Structural, Nanomechanical and Nanotribological Characterization of Human Hair Using Atomic Force Microscopy and Nanoindentation / Carmen La Torre ; Guohua Wei39.5： |
| Human Hair, Skin and Hair Care Products / 40.1： |
| Experimental Techniques / 40.2： |
| Structural Characterization Using an AFM / 40.3： |
| Nanomechanical Characterization Using Nanoindentation and Nanoscratch / 40.4： |
| Macroscale Tribological Characterization / 40.5： |
| Nanotribological Characterization Using an AFM / 40.6： |
| A Conditioner Thickness Approximation / 40.7： |
| Mechanical Properties ofNanostructures Bharat Bhushan / 41： |
| Experimental Techniques for Measurementof Mechanical Properties of Nanostructures / 41.1： |
| Experimental Results and Discussion / 41.2： |
| Finite Element Analysis of Nanostructures with Roughness and Scratches / 41.3： |
| Molecularly Thick Films for Lubrication / 41.4： |
| Nanotribology of Ultrathin and Hard Amorphous Carbon Films Bharat Bhushan / 42： |
| Description of Common Deposition Techniques / 42.1： |
| Chemical and Physical Coating Characterization / 42.2： |
| Micromechanical and Tribological Coating Characterization / 42.3： |
| Self-Assembled Monolayers (SAMs) for Controlling Adhesion, Friction, and Wear Bharat Bhushan / 42.4： |
| A Brief Organic Chemistry Primer / 43.1： |
| Self-Assembled Monolayers: Substrates, Spacer Chains; and End Groups in the Molecular Chains / 43.2： |
| Tribological Properties of SAMs / 43.3： |
| Nanoscale Boundary Lubrication Studies / Huiwen Liu43.4： |
| Lubricants Details / 44.1： |
| Nanodeformation, Molecular Conformation, and Lubricant Spreading / 44.2： |
| Boundary Lubrication Studies / 44.3： |
| Kinetics and Energetics in Nanolubrication / Rene M. Overney ; George W. Tyndall ; Jane Frommer44.4： |
| Background: From Bulk to Molecular Lubrication / 45.1： |
| Thermal Activation Model of Lubricated Friction / 45.2： |
| Functional Behavior of Lubricated Friction / 45.3： |
| Thermodynamical Models Based on Small and Nonconforming Contacts / 45.4： |
| Limitationof the Gaussian Statistics - The Fractal Space / 45.5： |
| Fractal Mobility in Reactive Lubrication / 45.6： |
| Metastable Lubricant Systems in Large Conforming Contacts / 45.7： |
| Industrial Applications / 45.8： |
| The """"Millipede"""" - A Nanotechnology-Based AFM Data-Storage System / Gerd K. Binnig ; G. Cherubini ; M. Despont ; Urs T. Dürig ; Evangelos Eleftheriou ; H. Pozidis ; Peter Vettiger46： |
| The Millipede Concept / 46.1： |
| Thermomechanical AFM Data Storage / 46.2： |
| Array Design, Technology, and Fabrication / 46.3： |
| Array Characterization / 46.4： |
| x/y/z Medium Microscanner / 46.5： |
| First Write/Read Results with the 32x32 Array Chip / 46.6： |
| Polymer Medium / 46.7： |
| Read Channel Model / 46.8： |
| System Aspects / 46.9： |
| Nanotechnology for Data Storage Applications / Dror Sarid ; Brendan McCarthy ; Ghassan E. Jabbour46.10： |
| Current Status of Commercial Data Storage Devices / 47.1： |
| Opportunities Offered by Nanotechnology for Data Storage / 47.2： |
| Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files / Roberto Horowitz ; Tsung-Lin (Tony) Chen ; Kenn Oldham ; Yunfeng Li ; Xinghui Huang ; Shih-Chung Kon ; Ryozo Nagamune47.3： |
| Design of the Electrostatic Microactuator / 48.1： |
| Fabrication / 48.2： |
| Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems / 48.3： |
| Nanorobotics Bradley J. Nelson, Lixin Dong / 48.4： |
| Overview of Nanorobotics / 49.1： |
| Actuation at Nanoscales / 49.2： |
| Nanorobotic Manipulation Systems / 49.3： |
| Nanorobotic Assembly / 49.4： |
| Micro/Nanodevice Reliability / 49.5： |
| Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices / 50： |
| Tribological Studies of Silicon and Related Materials / 50.1： |
| Lubrication Studies for MEMS/NEMS / 50.3： |
| Tribological Studies of Biological Molecules on Silicon-Based Surfaces and of Coated Polymer Surfaces / 50.4： |
| Nanopatterned Surfaces / 50.5： |
| Component-Level Studies / 50.6： |
| A Appendix Micro/Nanofabrication Methods / 50.7： |
| Experimental Characterization Techniques for Micro/Nanoscale Devices / Kimberly L. Turner ; Peter G. Hartwell51： |
| Motivation / 51.1： |
| Applications Utilizing Dynamic MEMS/NEMS / 51.2： |
| Test/Characterization Techniques / 51.3： |
| Example: Characterizing an In-Plane MEMS Actuator / 51.4： |
| Design for Test / 51.5： |
| Failure Mechanisms in MEMS/NEMS Devices / W. Merlijn van Spengen ; Robert Modlinski ; Robert Puers ; Anne Jourdain52： |
| Failure Modes and Failure Mechanisms / 52.1： |
| Stiction and Charge-Related Failure Mechanisms / 52.2： |
| Creep, Fatigue, Wear, and Packaging-Related Failures / 52.3： |
| Mechanical Properties of Micromachined Structures / Harold Kahn52.4： |
| Measuring Mechanical Properties of Films on Substrates / 53.1： |
| Micromachined Structures for Measuring Mechanical Properties / 53.2： |
| Measurements of Mechanical Properties / 53.3： |
| Thermo- and Electromechanical Behavior of Thin-Film Micro and Nanostructures / Martin L. Dunn ; Shawn J. Cunningham54： |
| Thermomechanics of Multilayer Thin-Film Structures / 54.1： |
| Electromechanics of Thin-Film Structures / 54.2： |
| Summaryand Topics not Covered / 54.3： |
| High Volume Manufacturing and Field Stability of MEMS Products / Jack Martin55： |
| Manufacturing Strategy / 55.1： |
| Robust Manufacturing / 55.2： |
| Stable Field Performance / 55.3： |
| Packaging and Reliability Issues in Micro/Nano Systems / Jongbaeg Kim ; Yu-Ting Cheng ; Mu Chiao ; Liwei Lin56： |
| Introduction to Micro-/Nano-Electromechanical (MEMS)/(NEMS) Packaging / 56.1： |
| Hermetic and Vacuum Packaging and Applications / 56.2： |
| Thermal Issues and Packaging Reliability / 56.3： |
| Future Trends and Summary / 56.4： |
| Technological Convergence and Governing Nanotechnology / Part H： |
| Technological Convergence from the Nanoscale / William Sims Bainbridge57： |
| Nanoscience Synergy / 57.1： |
| Dynamics of Convergence from the Nanoscale / 57.2： |
| Ethical, Legal and Social Implications / 57.3： |
| Transformative Synthesis / 57.4： |
| Cultural Implications of Convergence / 57.5： |
| Governing Nanotechnology: Social, Ethical and Human Issues / 57.6： |
| Social Science Background / 58.1： |
| Human Impacts of Nanotechnology / 58.2： |
| Regulating Nanotechnology / 58.3： |
| The Cultural Contextfor Nanotechnology / 58.4： |
| Acknowledgements / 58.5： |
| About the Authors |
| Subject Index |
図書
