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1.

図書

図書
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash., USA : SPIE, c1995  vii, 450 p. ; 28 cm.; jf08 12-18-95 to SL
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2437
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2.

図書

図書
Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash., USA : SPIE, c1995  xi, 514 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2439
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3.

図書

図書
sponsored by ISHM--the Microelectronics Society ... [et al.] ; endorsed by SEMI--Semiconductor Equipment and Materials International, PCMCIA--Personal Computer Memory Card International Association ; [edited and assembled by the 1995 Technical Program Committee and ISHM staff]
出版情報: Reston, Va. : ISHM : Published in cooperation with SPIE--the International Society for Optical Engineering, c1995  572 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2575
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4.

図書

図書
Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash. : SPIE, c1995  vii, 238 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2637
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5.

図書

図書
Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1995  v, 154 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2641
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6.

図書

図書
Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1995  ix, 296 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2642
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7.

図書

図書
Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1996  ix, 372 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2874
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8.

図書

図書
Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1996  viii, 392 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2875
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9.

図書

図書
Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1996  vii, 258 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2876
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10.

図書

図書
Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1996  ix, 218 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2877
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11.

図書

図書
Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
出版情報: Bellingham, Wash., USA : SPIE, 1996  ix, 296 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2880
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12.

図書

図書
Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  x, 636 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3050
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13.

図書

図書
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  xi, 982 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3051
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14.

図書

図書
Divyseh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
出版情報: Bellingham, Wash. : SPIE, c1997  vii, 132 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3214
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15.

図書

図書
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
出版情報: Bellingham, Wash., USA : SPIE, c1997  v, 186 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3215
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16.

図書

図書
Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology
出版情報: Bellingham, Wash., USA : SPIE, c1997  ix, 382 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3224
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17.

図書

図書
Craig R. Friedrich, Akira Umeda, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Solid State Technology ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Washington : SPIE, c1997  vii, 134 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3225
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18.

図書

図書
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology
出版情報: Bellingham, Wash. : SPIE, c1997  v, 214 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3226
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19.

図書

図書
Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1998  xi, 442 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3512
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20.

図書

図書
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Washington : SPIE, c1998  vii, 240 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3513
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21.

図書

図書
Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Washington : SPIE, c1998  viii, 440 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3514
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22.

図書

図書
A. Bruno Frazier, Chong Hyuk Ahn, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Washington : SPIE, c1998  vii, 292 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3515
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23.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c1999  vi, 455 p. ; 28 cm
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24.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c1998  vi, 482 p. ; 28 cm
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25.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c1997  vi, 460 p. ; 28 cm
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26.

図書

図書
general chair, Don Millard
出版情報: [New York] : Institute of Electrical and Electronics Engineers , Piscataway, NJ : May be purchased from IEEE Service Center, c1997  xiv, 482 p. ; 28 cm
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27.

図書

図書
sponsored by ISHM--the Microelectronics Society ... [et al.] ; in cooperation with SEMI--Semiconductor Equipment and Materials International, IPC--the Institute for Interconnecting and Packaging Electronic Circuits, SPIE--the International Society for Optical Engineering
出版情報: [Bellington, Wash.] : SPIE, c1994  x, 630 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2256
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28.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c1996  vi, 479 p. ; 28 cm
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29.

図書

図書
Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1995  vii, 336 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2639
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30.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Mountain View, CA : Additional copies of these proceedings may be purchased from: SEMI, c1994  vi, 335 p. ; 28 cm
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31.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Mountain View, CA : Additional copies of these proceedings may be purchased from: SEMI, c1995  vi, 391 p. ; 28 cm
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32.

図書

図書
David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash. : SPIE, c1994  ix, 420 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2194
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33.

図書

図書
IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International ; Ultra Clean Society
出版情報: Piscataway, NJ : IEEE Service Center, c1995  ix, 294 p. ; 28 cm
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34.

図書

図書
IEEE/CPMT International Electronics Manufacturing Technology Symposium ; Semiconductor Equipment and Materials International ; Components, Packaging & Manufacturing Technology Society
出版情報: Piscataway, NJ : IEEE Service Center, c1996  xiv, 498 p. ; 28 cm
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35.

図書

図書
IEEE/SEMI International Semiconductor Manufacturing Science Symposium ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers , Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1991  x, 164 p. ; 28 cm
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36.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ, USA : Additional copies of this proceedings may be purchased from: IEEE Service Center, c1992  v, 232 p. ; 28 cm
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37.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers , Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1990  x, 164 p. ; 28 cm
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38.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers , Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1991  x, 212 p. ; 28 cm
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39.

図書

図書
IEEE/SEMI International Semiconductor Manufacturing Science Symposium ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1992  ix, 146 p. ; 28 cm
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40.

図書

図書
[sponsored by Semiconductor Equipment and Materials International ... [et al.]]
出版情報: New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers , Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1990  vi, 152 p. ; 28 cm
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41.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Mountain View, CA : Additional copies of these proceedings may be purchased from: SEMI, c1993  vi, 253 p. ; 28 cm
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42.

図書

図書
IEEE/SEMI International Semiconductor Manufacturing Science Symposium ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ, USA : IEEE Service Center, c1993  152 p. ; 28 cm
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43.

図書

図書
Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
出版情報: Bellingham, Wash. : SPIE--The International Society of Optical Engineering, c1996  ix, 366 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2879
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44.

図書

図書
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1998  xi, 402 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3511
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45.

図書

図書
M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
出版情報: Bellingham, WA : SPIE, 1996  v, 220 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2881
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46.

図書

図書
Kevin Chau, Ray M. Roop, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute for Standards and Technology
出版情報: Bellingham, WA : SPIE, 1996  ix, 340 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2882
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47.

図書

図書
Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash. : SPIE, c1999  2 v. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3676
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48.

図書

図書
Fang-Chen Luo, Shin-Tson Wu, Shunsuke Kobayashi, chairs/editors ; organized by SPIE--the International Society for Optical Engineering ... [et al.] ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International Taiwan ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1998  vii, 236 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3421
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49.

図書

図書
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Wash. : SPIE, c1996  vii, 412 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2723
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