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1.

図書
図書
1. Introduction to microlithography : theory, materials, and processing
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
出版情報: Washington, D.C. : The American Chemical Society, 1983  ix, 363 p. ; 24 cm
シリーズ名: ACS symposium series ; 219
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目次情報: 続きを見る
An introduction to lithography / L.F. Thompson
The lithographic process
The physics / L.F. Thompson and M.J. Bowden
Organic resist materials
Theory and chemistry / C. Grant Willson
Resist processing / L.F. Thompson and M.J. Bowden
Plasma etching / J.A. Mucha and D.W. Hess
Multi-layer resist systems / B.J. Lin
An introduction to lithography / L.F. Thompson
The lithographic process
The physics / L.F. Thompson and M.J. Bowden
2.

図書
図書
2. Electronic and photonic applications of polymers
Murrae J. Bowden, editor, S. Richard Turner, editor
出版情報: Washington, DC : American Chemical Society, 1988  xiii, 372 p. ; 24 cm
シリーズ名: Advances in chemistry series ; 218
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