Material Development and Optimization / Part I: |
Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers / Jane Wang1: |
Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy / Churamani Gaire2: |
Gold in flux-less bonding: noble or not noble / Marco Balucani3: |
Giant piezoresistive variation of metal particles dispersed in PDMS matrix / Stefano Stassi4: |
Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications / J. Justice5: |
Transport model for microfluidic device for cell culture and tissue development / Niraj Inamdar6: |
Refractive index memory effect of ferroelectric materials by domain control / Kazuhiko Inoue7: |
Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission / Masato Uehara8: |
Improving PZT thin film texture through Pt metallization and seed layers / Luz Sanchez9: |
Process Integration / Part II: |
Patterning nanomaterials on fragile micromachined structures using electron beam lithography / Srikar Vengallatore10: |
Pt/TiO2 growth templates for enhanced PZT films and MEMS devices / Daniel Potrepka11: |
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C / Joumana El-Rifai12: |
PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process / Naoto Kochi13: |
Reliability and stability of thin-film amorphous silicon MEMS on glass substrates / Pedro Sousa14: |
High yield polymer MEMS process for CMOS/MEMS integration / V. Seena15: |
Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates / Xuelian Zhao16: |
Micro- and Nanosensors / Part III: |
A picowatt energy harvester / Joseph Evans17: |
Mechanical and material characterization of bilayer microcantilever-based IR detectors / Xin Zhang18: |
Film conductivity controlled variation of the amplitude distribution of high-temperature resonators / Silja Schmidtchen19: |
Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport / Zeinab Sanaee20: |
Development of a robust design for wet etched co-integrated pressure sensor systems / Reinhart Job21: |
SU8/modified MWNT composite for piezoresistive sensor application / 22: |
Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates / Alexandra Gualdino23: |
Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite / Allison Hess24: |
Material and Device Reliability / Part IV: |
Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures / Enrique Escobedo-Cousin25: |
Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing / Reiko Hiruta26: |
Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks / Maurizio Gullo27: |
Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading / Kuo-Shen Chen28: |
Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films / Elena Bassiachvili29: |
Residual stress in sputtered silicon oxycarbide thin films / 30: |
Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles / Daniel Peter31: |
Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs / Yoonkap Kim32: |
Material Development and Optimization / Part I: |
Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers / Jane Wang1: |
Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy / Churamani Gaire2: |