Advances in resist technology : March 12-13, 1984, Santa Clara, California

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Advances in resist technology : March 12-13, 1984, Santa Clara, California / chairman/editor: C. Grant Willson

資料種別:

図書

出版情報:

Bellingham, Wash., USA : S.P.I.E.-- International Society for Optical Engineering, c1984

形態:

vi, 195 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 469 <BA0022700X>

著者名:

ISBN:

9780892525041 [0892525045] (pbk.)

書誌ID:

BA23969995

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographies and index
主題:	Photoresists--Congresses
言語:	英語

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