Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California | 東京工業大学附属図書館蔵書検索

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Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1992

形態:

ix, 419 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1594 <BA0022700X>

著者名:

ISBN:

9780819407252 [0819407259]

書誌ID:

BA26307002

子書誌情報

フルテキスト

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書誌詳細

注記:	"Part of a two-conference program on Microelectronic Manufacturing Science and Technology held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. vii Includes bibliographical references and index
主題:	Integrated circuits--Design and construction--Congresses; Manufacturing processes--Automation--Congresses; Microelectronics industry--Production control--Congresses; Optical detectors--Industrial applications--Congresses
言語:	英語

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