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Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992 / sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section ; W. Benecke, H.-C. Petzold (eds.)

資料種別:
図書
出版情報:
[New York, NY] : IEEE, 1992
形態:
xv, 240 p. ; 30 cm
著者名:
ISBN:
9780780304970 [0780304977] (: soft.)
9780780304987 [0780304985] (: case.)
9780780304994 [0780304993] (: micro.)
書誌ID:
BA18159475
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