Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium / editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics
- 資料種別:
- 図書
- 出版情報:
- Pennington, N.J. : Electrochemical Society, c2005
- 形態:
- xiii, 588 p. ; 24 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 2005-01 <BA01323290>
- 著者名:
- ISBN:
- 9781566774598 [1566774594]
- 書誌ID:
- BA7416305X
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6
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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
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