Silicon nitride, silicon dioxide, and emerging dielectrics 9 | 東京工業大学附属図書館蔵書検索

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Silicon nitride, silicon dioxide, and emerging dielectrics 9 / editors, R. Ekwal Sah ... [et al.]

資料種別:

図書

出版情報:

Pennington, N.J. : Electrochemical Society, c2007

形態:

xii, 847 p. ; 23 cm

シリーズ名:

ECS transactions ; vol. 6, no. 3 <BA78566502>

著者名:

ISBN:

9781566775526 [1566775523]

書誌ID:

BA82032137

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注記:	"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.
言語:	英語

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