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1.

図書
図書
1. Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
editors, Jörg Bagdahn ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2010  ix, 211 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 1222
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2.

図書
図書
2. Amorphous and polycrystalline thin-film silicon science and technology--2010 : symposium held April 5-9, 2010, San Francisco, California
editors, Qi Wang ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society, c2010  xvi, 476 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 1245
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3.

図書
図書
3. Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. (: hard)
editors, Frank W. DelRio ... [et al.]
出版情報: Warrendale, Pa. : Materials Research Society , Cambridge : Cambridge University Press, 2011  ix, 207 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 1299
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目次情報: 続きを見る
Material Development and Optimization / Part I：
Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers / Jane Wang1：
Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy / Churamani Gaire2：
Gold in flux-less bonding: noble or not noble / Marco Balucani3：
Giant piezoresistive variation of metal particles dispersed in PDMS matrix / Stefano Stassi4：
Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications / J. Justice5：
Transport model for microfluidic device for cell culture and tissue development / Niraj Inamdar6：
Refractive index memory effect of ferroelectric materials by domain control / Kazuhiko Inoue7：
Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission / Masato Uehara8：
Improving PZT thin film texture through Pt metallization and seed layers / Luz Sanchez9：
Process Integration / Part II：
Patterning nanomaterials on fragile micromachined structures using electron beam lithography / Srikar Vengallatore10：
Pt/TiO2 growth templates for enhanced PZT films and MEMS devices / Daniel Potrepka11：
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C / Joumana El-Rifai12：
PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process / Naoto Kochi13：
Reliability and stability of thin-film amorphous silicon MEMS on glass substrates / Pedro Sousa14：
High yield polymer MEMS process for CMOS/MEMS integration / V. Seena15：
Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates / Xuelian Zhao16：
Micro- and Nanosensors / Part III：
A picowatt energy harvester / Joseph Evans17：
Mechanical and material characterization of bilayer microcantilever-based IR detectors / Xin Zhang18：
Film conductivity controlled variation of the amplitude distribution of high-temperature resonators / Silja Schmidtchen19：
Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport / Zeinab Sanaee20：
Development of a robust design for wet etched co-integrated pressure sensor systems / Reinhart Job21：
SU8/modified MWNT composite for piezoresistive sensor application / 22：
Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates / Alexandra Gualdino23：
Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite / Allison Hess24：
Material and Device Reliability / Part IV：
Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures / Enrique Escobedo-Cousin25：
Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing / Reiko Hiruta26：
Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks / Maurizio Gullo27：
Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading / Kuo-Shen Chen28：
Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films / Elena Bassiachvili29：
Residual stress in sputtered silicon oxycarbide thin films / 30：
Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles / Daniel Peter31：
Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs / Yoonkap Kim32：
Material Development and Optimization / Part I：
Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers / Jane Wang1：
Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy / Churamani Gaire2：
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