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1.

図書

図書
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; cosponsored by Japan Chapter of SPIE ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1995  xi, 554 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2512
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2.

図書

図書
Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE, c1995  ix, 246 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2640
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3.

図書

図書
sponsored and published by SPIE--the International Society for Optical Engineering ; Susan K. Jones, chair/editor
出版情報: Bellingham, WA : SPIE, 1996  xiii, 802 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2725
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4.

図書

図書
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1996  xiii, 530 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2793
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5.

図書

図書
Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
出版情報: Bellingham, Wash., USA : SPIE, 1996  ix, 296 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2880
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6.

図書

図書
Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS
出版情報: Bellingham, Wash. : SPIE, c1996  x, 586 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2884
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7.

図書

図書
Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  x, 636 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3050
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8.

図書

図書
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  xi, 982 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3051
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9.

図書

図書
Craig R. Friedrich, Akira Umeda, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Solid State Technology ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Washington : SPIE, c1997  vii, 134 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3225
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10.

図書

図書
James A Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版情報: Bellingham, Washington : SPIE, c1998  ix, 554 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3236
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