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1.

図書
図書
1. Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
Kevin M. Monahan, editor
出版情報: Bellingham, Wash. : SPIE Optical Engineering Press, c1994  x, 358 p. ; 27 cm
シリーズ名: Critical reviews of optical science and technology ; v. CR52
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2.

図書
図書
2. Laser-induced damage in optical materials, 1990 : 22nd Annual Boulder Damage Symposium, proceedings, 24-26, October, 1990,Boulder, Colorado
sponsors, American Society for Testing Materials ... [et al.] ; editors, Harold E. Bennet
出版情報: Bellingham, Washington : SPIE, c1991  xx, 572 p. ; 28 cm
シリーズ名: ASTM special technical publication ; 1141
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1441
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