Atomic layer deposition applications

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Atomic layer deposition applications / editors, A. Londergan ... [et al.] ; sponsoring division, Dielectric Science & Technology

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c2007-

形態:

v. ; 23 cm

シリーズ名:

ECS transactions ; vol. 3, no. 15, vol. 11, no. 7, vol. 16, no. 4 <BA78566502>

著者名:

ISBN:

9781566775427 [1566775426] (2)
9781566775731 [1566775736] (3)

書誌ID:

BA82713101

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注記:

Includes bibliographical references and author index
"... held on October 29 through November 1, 2006 in the Moon Palace Resort, Cancun, Mexico as part of the 210th Meeting of the Electrochemical Society" -- 2
"... held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th Meeting of the Electrochemical Society."--3
"... held on October 13 through 15, 2008 in Honolulu, Hawaii, as part of the 214th Meeting of the Electrochemical Society" --4

言語:

英語

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