Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A. / editors, Bernard M. Gallois, Woo Y. Lee, Michael A. Pickering
- 資料種別:
- 図書
- 出版情報:
- Pittsburgh, Pa. : Materials Research Society, c1995
- 形態:
- xi, 282 p. ; 24 cm
- シリーズ名:
- Materials Research Society symposium proceedings ; v. 363 <BA00013775>
- 著者名:
- ISBN:
- 9781558992641 [1558992642]
- 書誌ID:
- BA24954960
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10
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