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1.

図書
図書
1. Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c2000  ix , 328 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4099
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2.

図書
図書
2. Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA
Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations the Boeing Company (USA) ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c2002  viii, 192 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4779
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3.

図書
図書
3. Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2001  ix, 294 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4449
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