所蔵情報QRコード
Proceedings of the Symposium on Inorganic Resist Systems / edited by Daryl Ann Doane, Adam Heller ; [cosponsored by] Dielectrics and Insulation and Electronics Divisions and New Technology Subcommittee
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : Electrochemical Society, c1982
- 形態:
- vii, 310 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 82-9 <BA01323290>
- 著者名:
- 書誌ID:
- BA06289440
類似資料:
Electrochemical Society | |
Electrochemical Society |
S.P.I.E.-- International Society for Optical Engineering |
International Society for Optical Engineering |
International Society for Optical Engineering |
American Chemical Society, 1987 |
10
図書
Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California (pbk.)
SPIE--the International Society for Optical Engineering |