Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1985

形態:

xv, 393 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 45 <BA00013775>

著者名:

Appleton, B. R. <DA01778672>

Eisen, Fred H. <DA02600177>

Sigmon, T. W. <DA02460952>

Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology <DA0260036X>

Materials Research Society <DA00024949>

Materials Research Society. Meeting <DA00721013>

さらに 1 件

ISBN:

9780931837104 [0931837103]

書誌ID:

BA03908025

子書誌情報

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書誌詳細

注記:	"These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref Includes bibliographies and indexes
主題:	Ion implantation--Congresses; Semiconductors--Congresses
言語:	英語

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