Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom | 東京工業大学附属図書館蔵書検索

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Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom / Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] ; cooperating organizations, IEE--Institute of Electrical Engineers(UK), IMechE--the Institution of Mechanical Engineers(UK)

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c2000

形態:

viii, 192 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4075 <BA0022700X>
Proceedings EurOpto series <BA22033277>

著者名:

ISBN:

9780819437129 [0819437123]

書誌ID:

BA60241847

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Microfabrication--Congresses; Optoelectronic devices--Congresses
言語:	英語

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