Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology | 東京工業大学附属図書館蔵書検索

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Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology / edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy ; [sponsored by] Electronics Division

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1993

形態:

xi, 628 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 93-6 <BA01323290>

著者名:

ISBN:

9781566770644 [1566770645]

書誌ID:

BA19907961

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書誌詳細

注記:	"The collection of papers included in this volume were presented at the Third International Symposium on Process Physics and Modeling in Semiconductor Technology held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society."
言語:	英語

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