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1.

図書

図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)
出版情報: Bellingham, Wash., : SPIE , Berlin, Germany : VDE Verlag GmbH, c2005  xxx, 302 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5835
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2.

図書

図書
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1999  ix, 180 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3665
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3.

図書

図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)
出版情報: Bellingham, Wash. : SPIE, c2000  xii, 252 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3996
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