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1.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
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2.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
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3.

図書

図書
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6520
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4.

図書

図書
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
出版情報: Bellingham, Wash., USA : SPIE, c1995  vii, 450 p. ; 28 cm.; jf08 12-18-95 to SL
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2437
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5.

図書

図書
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; cosponsored by Japan Chapter of SPIE ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1995  xi, 554 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2512
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6.

図書

図書
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1996  xiii, 530 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2793
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7.

図書

図書
Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS
出版情報: Bellingham, Wash. : SPIE, c1996  x, 586 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2884
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8.

図書

図書
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Washington : SPIE, c1997  xi, 982 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3051
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9.

図書

図書
James A Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版情報: Bellingham, Washington : SPIE, c1998  ix, 554 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3236
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10.

図書

図書
Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c2007  1 v. (various pagings) ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6607
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