close
1.

図書

図書
Naoaki Aizaki, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; supporting societies, the Japan Society of Applied Physics ... [et al.] ; published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Washington : SPIE, c1997  xiii, 504 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3096
所蔵情報: loading…
2.

図書

図書
VDI/VDE-Gesellschaft Feinwerktechnik
出版情報: Düsseldorf : VDI Verlag, c1986  168 p. ; 23 cm
シリーズ名: VDI-Berichte ; 621
所蔵情報: loading…
3.

図書

図書
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
出版情報: Bellingham, Wash. : SPIE, c1996  vii, 412 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2723
所蔵情報: loading…
4.

図書

図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)
出版情報: Bellingham, Wash., : SPIE , Berlin, Germany : VDE Verlag GmbH, c2005  xxx, 302 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5835
所蔵情報: loading…
5.

図書

図書
Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c2005  xi, 380 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5645
所蔵情報: loading…
6.

図書

図書
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1999  ix, 180 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3665
所蔵情報: loading…
7.

図書

図書
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)
出版情報: Bellingham, Wash. : SPIE, c2000  xii, 252 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3996
所蔵情報: loading…
8.

図書

図書
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版情報: Bellingham, Wash. : SPIE, c1992  vii, 348 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1604
所蔵情報: loading…
9.

図書

図書
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版情報: Bellingham, Wash. : SPIE, c1993  ix, 286 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1809
所蔵情報: loading…
10.

図書

図書
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版情報: Bellingham, Wash. : SPIE, c1994  ix, 422 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2087
所蔵情報: loading…
文献の複写および貸借の依頼を行う
 文献複写・貸借依頼