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1.

図書
図書
1. Selected papers on optics and photonics : optical diagnostics of materials and devices for opto-, micro-, and quantum electronics
Sergey V. Svechnikov, Mikhail Ya. Valakh, chairs/editors ; organized by SPIE Ukraine Chapter [and] Institute of Semiconductor Physics (Ukraine)
出版情報: Bellingham, Wash., USA : SPIE, c2003  vii, 230 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5024
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2.

図書
図書
2. Materials for microlithography : radiation-sensitive polymers
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
出版情報: Washington, D.C. : The Society, 1984  viii, 494 p. ; 24 cm
シリーズ名: ACS symposium series ; 266
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3.

図書
図書
3. Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
editors, Marc Wittmer, James Stimmell, Michael Strathman
出版情報: Pittsburgh, Pa. : Materials Research Society, c1986  xvii, 535 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 71
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4.

図書
図書
4. Microelectronics processing : inorganic materials characterization
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society
出版情報: Washington, DC : American Chemical Society, 1986  x, 443 p
シリーズ名: ACS symposium series ; 295
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目次情報: 続きを見る
Analytical Approaches and Expert Systems in the Characterization of Microelectronic
Devices Electrical Characterization of Semiconductor
Materials and Devices Dopant Profiles by the Spreading Resistance Technique
SEM Techniques for Characterization of Semiconductor Materials
Semiconductor Materials Defect Diagnostics for Submicron VLSI
Technology Applications of Secondary Ion Mass Spectroscopy to Characterization of Microelectronic
Materials Applications of Auger Electron Spectroscopy in Microelectronics
X-Ray Photoelectron Spectroscopy Applied to Microelectronic Materials
Application of Neutron Depth Profiling to Microelectronic Materials
Processing Thermal-Wave Measurement of Thin Film
Thickness Characterization of Materials, Thin Films, and Interfaces by Optical Reflectance and Ellipsometric Techniques
Measurement of the Oxygen and Carbon
Content of Silicon Wafers by Fourier Transform
Spectrophotometry Application of the Raman Microprobe to Analytical Problems of Microelectronics
Characterization of GaAs by Magneto-Optical Photoluminescent Spectroscopy
Thermal-Wave Imaging in a Scanning Electron Microscope Fourier
Transform Mass Spectrometry in the Microelectronics
Service Laboratory Materials Characterization
Using Elemental and Isotope Analysis by Inductively
Coupled Plasma Mass Spectrometry (ICP-MS)
Activation Analysis of Electronics Materials
Trace Element Survey Analyses by Spark Source Mass Spectrography (SSMS)
Characterization of Components in Plasma Phosphorus
Doped Oxides Process Control of Vacuum-Deposited
Nickel-Chromium for the Fabrication of Reproducible
Thin Film Resistors Characterization of Spin-On Glass
Films as a Planarizing Dielectric Effects of Various
Chemistries on Silicon Wafer Cleaning
Monitoring of Particles in Gases
Using a Laser Counter Microelectronics Processing Problem Solving
The Synergism of Complementary Techniques
Analytical Approaches and Expert Systems in the Characterization of Microelectronic
Devices Electrical Characterization of Semiconductor
Materials and Devices Dopant Profiles by the Spreading Resistance Technique
5.

図書
図書
5. Smart mechanical systems--adaptronics
Society of Automotive Engineers ; International Scientific Conference on "Smart Mechanical Systems--Adaptronics"
出版情報: Warrendale, PA : Society of Automotive Engineers, c1998  250 p. ; 29 cm
シリーズ名: SAE Proceedings ; P-325
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6.

図書
図書
6. Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
Vijay K. Varadan ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ... [et al.] ; cooperating organizations, Air Force Research Laboratory ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1998  ix, 430 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3328
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7.

図書
図書
7. Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California
Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by American Society of Mechanical Engineers, Materials Research Society, Society for Experimental Mechanics ; cooperating organizations IEEE/Control Systems Society ... [et al.]
出版情報: Bellingham : SPIE, c1995  ix, 280 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2448
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8.

図書
図書
8. Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
editors, Lubomyr T. Romankiw, Dean A. Herman, Jr.
出版情報: Pennington, NJ : Electrochemical Society, c1996  xiv, 802 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-18
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9.

図書
図書
9. Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
Vijay K. Varadan, Paul J. McWhorter, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by American Society of Mechanical Engineers ... [et al.] ; cooperating organizations Air Force Wright Lab. ... [et al.]
出版情報: Bellingham, Wash., USA : SPIE, c1996  ix, 274 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2722
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10.

図書
図書
10. Dry etch technology : 9-10-September 1991, San Jose, California
Deepak Ranadive, chair ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1992  viii, 222 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1593
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