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1.

図書
図書
1. Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology (: set ; v. 1 ; v. 2)
[sponsored by Electronics Division of the Electrochemical Society, Inc.] ; editors, H.R. Huff, H. Tsuya, U. Gösele
出版情報: Pennington, NJ : The Electrochemical Society, c1998  2 v. (xx, 1638 p.) ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-1
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2.

図書
図書
2. Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
editors, Hans-Joachim L. Gossmann ... [et al.]
出版情報: Warrendale, PA : Materials Research Society, 1999  xi, 298 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 568
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