Micro-electro-mechanical systems (MEMS) 1999 : presented at the 1999 International Mechanical Engineering Congress and Exposition, November 14-19, 1999, Nashville, Tennessee

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Micro-electro-mechanical systems (MEMS) 1999 : presented at the 1999 International Mechanical Engineering Congress and Exposition, November 14-19, 1999, Nashville, Tennessee / sponsored by the Fluids Engineering Division, ASME, the Electrical and Electronic Packaging Division, ASME, the Heat Transfer Division, ASME, the Bioengineering Division, ASME ; edited by Y. C. Lee ... [et al.]

資料種別:

図書

出版情報:

New York, N.Y. : American Society of Mechanical Engineers, c1999

形態:

x, 611 p. ; 28 cm

シリーズ名:

MEMS ; vol. 1 <BA51061028>

著者名:

Lee, Abraham P.

International Mechanical Engineering Congress and Exposition <DA09785194>

American Society of Mechanical Engineers. Fluids Engineering Division <DA02848616>

American Society of Mechanical Engineers. Electrical and Electronic Packaging Division <DA07130252>

American Society of Mechanical Engineers. Heat Transfer Division <DA00088690>

American Society of Mechanical Engineers. Bioengineering Division <DA07126823>

さらに 1 件

ISBN:

9780791816387 [0791816389]

書誌ID:

BA5106031X

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

ISSN:

1096665X

注記:

Includes bibliographical references and author index

主題:

Fluidic devices Congresses; Microelectromechanical systems Congresses

言語:

英語

目次情報:

Microelectromechanical Systems

Introduction / Abraham Lee ; Thomas Kenny ; N. Aluru ; V. Bright ; Cetin Cetinkaya ; J. Chung ; Don DeVoe ; K. Goodson ; T. Hirano ; C. J. Kim ; L. Kin ; Jonathan Simon ; C. Wong

Design Methodology, Modeling and Characterization of MEMS

Influence of Support Compliance and Residual Stress on the Shape of Doubly-Supported Surface-Micromachined Beams / Mauro J. Kobrinsky ; Erik R. Deutsch ; Stephen D. Senturia

Three-Dimensional Modeling of Solder Shape for the Design of Solder Self-Assembled Micro-Electro-Mechanical Systems / Paul E. Kladitis ; Kevin F. Harsh ; Victor M. Bright ; Y. C. Lee

Modeling and Imaging Flexural Plate Wave Devices / D. R. Adkins ; W. K. Schubert ; M. A. Butler ; A. S. Chu

High-Aspect-Ratio Electroplated Structures With 2 [mu]m Beamwidth / Xiaobin Li ; Siddharth Kiyawat ; Hector J. De Los Santos ; Chang-Jin "CJ" Kim

Modeling and Analysis of a Tunable Bistable MEMS for Opto-Mechanical Computational Logic Elements / M. Taher ; A. Saif ; Norm R. Miller

Novel Micromachining Processes and Packaging for MEMS

Localized Deposition of Polysilicon for MEMS Post-Fabrication Processing / Daphne Joachim ; Liwei Lin

Sputtered Silicon for Microstructures and Microcavities / Kenneth A. Honer ; Gregory T. A. Kovacs

EFAB: High Aspect Ratio, Arbitrary 3-D Metal Microstructures Using a Low-Cost Automated Batch Process / Fan-Gang Tseng ; Gang Zhang ; Uri Frodis ; Adam Cohen ; Florian Mansfeld ; Peter Will

X-Ray Fabrication of Repetitive Structures / Yadong Liu ; Paul Sheng

Micro-Stereolithography of 3D Complex Ceramic Microstructures and PZT Thick Films on Si Substrate / X. N. Jiang ; C. Sun ; X. Zhang

MEMS and Microfluidics Poster Session

Nonlinear Deformation of Multilayer MEMS Structures / Martin L. Dunn ; Yanhang Zhang ; Jeffrey M. Roy ; Paul E. W. Labossiere

Tension Test With Single-Crystalline-Silicon Microspecimen / Taechung Yi

Squeeze Film Damping Effects in a Micromachined Tunneling Accelerometer / Mark G. da Silva ; Ken Greiner ; Cheng-Hsien Liu ; Thomas W. Kenny ; John R. Gilbert

Thermal Design and Batch Fabrication of Cantilever Probes for Scanning Thermal Microscopy / Li Shi ; Ohmyoung Kwon ; Guanghua Wu ; Arunava Majumdar

Residual Stress and Thickness Control of Piezoelectric Multilayer Micromirror Actuators for Initial Deflection Minimization / Myeong-Jim Kim ; Young-Ho Cho

A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets / Ji-Chul Ryu ; Tae Goo Kang

Viscous Damping of On-Substrate Torsional Micromirrors / Eung-Sam Kim ; Ki-Ho Han

Optical Vibration and Acceleration Sensor with a Silicon Cantilever / Mitsuteru Kimura ; Katsuhisa Toshima ; Harunobu Satoh

A Thermal Cycler Fabricated With Low Temperature, Co-Fired Ceramic Tapes / Jihua Zhong ; Mingqiang Yi ; Haim H. Bau

Meso-Scale Electromagnetic Actuators Fabricated in Low-Temperature Co-Fired Ceramic Tapes / Moon Kim ; Dennis Kim ; G. K. Ananthasuresh

An Analytical Solution to the Electrostatic Actuation of an Asymmetric Combdrive / J.-L. Andrew Yeh ; Norman C. Tien ; Chung-Yuen Hui

Modeling, Simulation and Testing of Non-Linear Resonance Behavior in MEMS Torsional Mirrors With Mechanical-Electrostatic Coupling / Noa M. Rensing ; Stuart Dodson ; George G. Adams ; Paul M. Zavracky ; Robert. W. McClelland ; Anthony Lemoncelli

Composition Dependent Magnetostrictive Properties of NiFe Thin Films / Lutz H. Rissing ; Hans H. Gatzen

Distributed Resource Allocation for Smart Matter Using Decentralized Analog Computation and Communication / Chee We Ng ; Warren B. Jackson ; Koenraad Van Schuylenbergh ; David K. Biegelsen ; Tad Hogg ; Andrew A. Berlin

High Performance Electrostatic Air Valves Formed by Thin-Film Lamination / Patrick Cheung ; Lars E. Swartz ; Rachel Lau

Assembly and Testing of Surface Micromachined, Piezoresistive Polysilicon Pressure Sensors / Todd F. Miller ; David J. Monk ; Gary O'Brien ; William P. Eaton ; James H. Smith

Silicon Microrelays With Optimized Electrostatic Actuator / Joachim Schimkat

Linear Thermomechanical Microactuators / Rebecca Cragun ; Larry L. Howell

Integrated LTCC Coils for Multiple Applications in Meso-Electro-Mechanical Systems / Mario Gongora-Rubio ; Jorge J. Santiago-Aviles ; Luis Sola-Laguna ; Michael Smith

On the Modeling of the Wheatstone-Bridge Piezoresistive Pressure Sensor: A Finite-Element-Based Approach / Chahid K. Ghaddar

Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone / Meng-Nian Niu ; Hong Zeng ; Hai Yan ; Eun Sok Kim

Design, Analysis, Fabrication, and Testing of a MEMS Contact/Bending Sensor With Improved Dynamic Range / Thieu Q. Truong ; Terrence G. Barnes ; Xiaoqing Lu ; Nicol E. McGruer

Controlling and Coordinating Mobile Micro-Robots: Lessons From Nature / Chris Melhuish

A Silicon Micromachined Valve Driven by a Bi-Stable Electromagnetic Actuator / S. Bohm ; G. J. Burger ; M. T. Korthorst ; F. Roseboom

Measurement of Shear Stress and Temperature Using MEMS Fabricated Sensors / Kenneth S. Breuer ; Robert L. Bayt ; Anju Nayaar

Modeling, Design and Fabrication of a Microdevice for E-Field Cell LYSIS / Thomas Smekal ; Cindy Briscoe ; Tony Chan ; Yung Chang ; Seth Dobrin ; Sean Gallagher ; Heidi Groninger ; Rob Marrero ; David Rhine ; Huinan Yu ; Piotr Grodzinski

Partly Disposable Switching and Injection Microvalves for Medical Applications / Hironobu Sato ; Shuichi Shoji ; Eipin Kim ; Keisuke Miura

The Fabrication of Micro Mold Inserts Using Thick Film Resist Approach / Dale Ganser ; Kathleen A. Gehoski ; David Mancini

PIV Analysis of Instantaneous Flow Structures in an Inkjet Printhead / Hongsheng Zhang ; Carl D. Meinhart

Development of Planar Microfluidic Systems Using conventional and Low Temperature Assembling Schemes for Components / Nihat Okulan ; Shekhar Bhansali ; Arum Han ; Saman Dharmatilleke ; Jin-Woo Choi ; Manoj Patel ; Kwang W. Oh ; H. Thurman Henderson ; Chong H. Ahn

Integrated Mixing/Reaction Micro Flow Cell for Chemical and Biochemical Applications / Ryosuke Nakamura ; Akira Yotsumoto

Applications of MEMS in Mechanical Engineering

A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration / Xinxin Li ; Rongming Lin ; Minhang Bao

A Stiction Study Via C-V Plot Electrostatic Actuation/Latching

Investigation of Micro-Scale Materials Behavior With MEMS / M. A. Haque ; M. T. A. Saif

Fabrication of High-Index Refractive Microlenses for Near-Field Optics / D. A. Fletcher ; K. B. Crozier ; G. S. Kino ; Calvin F. Quate ; K. E. Goodson

Implementation and Analysis of Polymeric Replication by Micro-Injection Molding / Jatan Shah ; Yu-Chuan Su

Microsensors and Microactuators

Design, Fabrication and Characterization of Micromirror Array for Display Application / H. Shin ; H. Ko ; Y. Yoon ; B. Choi

Infrared Vision Using an Uncooled Thermo-Opto-Mechanical Camera: Design, Microfabrication, and Performance / M. Mao ; T. Perazzo ; O. Kwon ; Y. Zhao ; A. Majumdar

Low Voltage Dual-Mass Oscillator / Christopher W. Dyck ; James J. Allen ; Robert J. Huber

MEMS Device Design and Fabrication

Characteristics of 12 [mu]m Thick Polysilicon for an Optically-Sensed Accelerometer / Y. H. Chen ; T. D. Kudrle ; N. C. Tien

A New Driving Principle for Micromechanical Torsional Actuators / Harald Schenk ; Peter Durr ; Detlef Kunze ; Heinz Kuck

Experimental and Numerical Study on Micro-Stereolithography of Ceramics

The Effect of Residual Stresses on the Deformation of Semi-Circular Micromachined Beams / Chingfu Tsou ; Weileun Fang

Design, Analysis, Fabrication, and Testing of a MEMS Flow Sensor

Microfluidics

Capillary Forces at the Interface of a MEMS Actuator / Fred K. Forster ; Chad Sager ; Taher Saif

Simulation of Microfluidic Systems: A New Approach Considering Capillarity / Jorg Mellmann ; Michael Sesterhenn ; Markus Lohr ; Bernard Stierle ; Tilo Strobelt ; Roland Zengerle ; Hermann Sandmaier

PIV Measurement of Electro-Osmotic and Pressure-Driven Flow Components in Microfluidic Systems / Eric B. Cummings

Actuation Methods in MicroFluidics

Characterization of Shear Stress Field Induced by Obliquely Impinging Airjets / Elias Panides

An Electrochemically Actuated Micro Dosing System With Improved Dosing Control / Sebastian Bohm ; Wouter Olthuis ; Piet Bergveld

Theory and Modeling of Continuous Electrowetting Microactuation / Junghoon Lee

Laser Opto Microactuators Rotated by Molecular Gas Dynamics Effects / Masahiro Ota ; Yu-ichi Watanabe ; Moriyoshi Sakamoto

Topspot: A New Method for the Fabrication of Biochips / Holger Gruhler ; Nicolaus Hey ; Martin Muller ; Stefan Bekesi ; Michael Freygang

MicroFluidic Components and Systems

Fuel Injection by a Thermal Microinjector / Yi-Kuen Lee ; Ui-Chong Yi ; Chih-Ming Ho

Development of a Latching Valve for Micro-Chem-LabTM / C. Channy Wong ; Douglas R. Adkins ; Ronald P. Manginell ; Gregory C. Frye-Mason ; Peter J. Hesketh ; Thomas Stanczyk

Fabrication of a Free Floating Silicon Gate Valve / Alexandros P. Papavasiliou ; Dorian Liepmann ; Albert P. Pisano

Surface Micromachine Microfluidics: Design, Fabrication, Packaging, and Characterization / Paul Galambos ; Randy Shul ; Christi Gober Willison ; Jeffry J. Sniegowski ; Samuel L. Miller ; Daniel Gutierrez

An Integrated Reservoir for On-Chip Aqueous Storage in Microfluidic Systems

Computational Approaches to Microdevice Design

DSMC Simulation of Microfilter Elements / Ozgur Aktas ; N. R. Aluru ; Umberto Ravaioli

Coupled Electrostatics-Structures-Fluidic Simulations of a Bead Mesopump / M. M. Athavale ; H. Y. Li ; H. Q. Yang ; A. J. Przekwas ; C. Cabuz ; W. Herb

Numerical Modeling of Electroosmotically Driven Micro Flows / Prashanta Dutta ; Ali Beskok ; Timothy C. Warburton

High Fidelity and Compact Models of Synthetic Jets and Their Application in Aerodynamics and Microelectronics / Andrzej J. Przekwas ; Zhijian Chen ; Marek Turowski

An Actively Controlled Micromixer / Marion Volpert ; Igor Mezic ; Mohammed Dahleh

Particulate Handling and Sensing

Suspension Handling System / Daniel Baechi ; Rudolf Buser

Dielectrophoretic Manipulation of Particles for Use in Microfluidic Devices / Robin Miles ; Phil Belgrader ; Kerry Bettencourt ; Julie Hamilton ; Shanavaz Nasarabadi

Transport of Particle-Laden Fluids through Fixed-Valve Micropumps / Ling-Sheng Jang ; Christopher J. Morris ; Nigel R. Sharma ; Ron Bardell

Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection Using Redox Cycling / Ase Richard ; Oliver Klett ; Carola Strandman ; Ylva Backlund ; Leif Nyholm

Theoretical and Experimental Study of Mesoscopic Impactors / Howard Hu ; K. Erickson

MEMS Packaging

Pressure Sensors in Automotive Applications and Future Challenges / D. F. Baldwin ; V. M. Bright ; J. A. Chiou ; K. W. Markus ; Q. Tan ; J. Albert Chiou

Characterization of Silicon/Glass Anodic Bond Initiation Toughness / Shawn J. Cunningham

Multiple Through-Wafer Interconnects for Stacking of Microsystems / Matthias Heschel ; Kurt Rasmussen ; Jochen F. Kuhmann ; Siebe Bouwstra

Near-Field Electromagnetic Shielding Effect of On-Chip Electroplated Cooper Layers / Tae-Goo Kang

A Technique for Determining the Mechanical Behavior and Electrical Performance of Thin Films / Li Li ; Biao Huang ; Q. Qiao ; M. H. Gordon ; W. F. Schmidt ; S. S. Ang

Thermal Devices and Measurements

Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation / Timothy Moulton

The Electro-Thermally Driven Micro Membrane Actuators With Two-Way Deflection / Chen Peng Hsu ; Wensyang Hsu

Micro-Channels with Suspended Temperature Sensors for Heat Transfer Study / Linan Jiang ; Yuelin Wang ; Man Wong ; Yitshak Zohar

Thermal Conductivity of Porous Silicon Layers for MEMS / Uma Srinivasan ; Peter Breh ; Mehdi Asheghi ; Maxat Touzelbaev ; Kenneth E. Goodson

Modeling and Prediction of Sub-Micrometer Heat Transfer During Thermomechanical Data Storage / William P. King ; Juan G. Santiago

Medical Application of Microsystems

Design and Development of a Unit-Use Cartridge for Coagulation Testing in Whole Blood / Robert S. Keynton ; Michael C. Murphy ; Rhonda Cheadle ; Andy Maczuszenko ; Cindra Widrig Opalsky

Biological Force Measurements Using Micromachined Cantilevers / Y. Liang ; J. N. Welch ; R. G. Rudnitsky ; T. W. Kenny

A Simple Silicon Based Nitric Oxide Sensor / Marcelo Bariatto-Fontes ; Rogerio Furlan ; Koiti Arakai

Author Index

Microelectromechanical Systems

Introduction / Abraham Lee ; Thomas Kenny ; N. Aluru ; V. Bright ; Cetin Cetinkaya ; J. Chung ; Don DeVoe ; K. Goodson ; T. Hirano ; C. J. Kim ; L. Kin ; Jonathan Simon ; C. Wong

Design Methodology, Modeling and Characterization of MEMS

Influence of Support Compliance and Residual Stress on the Shape of Doubly-Supported Surface-Micromachined Beams / Mauro J. Kobrinsky ; Erik R. Deutsch ; Stephen D. Senturia

Three-Dimensional Modeling of Solder Shape for the Design of Solder Self-Assembled Micro-Electro-Mechanical Systems / Paul E. Kladitis ; Kevin F. Harsh ; Victor M. Bright ; Y. C. Lee

Modeling and Imaging Flexural Plate Wave Devices / D. R. Adkins ; W. K. Schubert ; M. A. Butler ; A. S. Chu

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