15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany / Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c1999
- 形態:
- ix, 180 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3665 <BA0022700X>
- 著者名:
- ISBN:
- 9780819431394 [0819431397]
- 書誌ID:
- BA60525844
類似資料:
SPIE, VDE Verlag GmbH |