Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California | 東京工業大学附属図書館蔵書検索

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Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California / Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1999

形態:

xi, 534 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3618 <BA0022700X>

著者名:

ISBN:

9780819430885 [0819430889]

書誌ID:

BA60544918

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Laser ablation Congresses; Lasers--Industrial applications Congresses; Manufacturing processes Congresses; Microelectronics industry--Equipment and supplies Congresses; Optoelectronic devices--Design and construction--Congresses
言語:	英語

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