Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida / O.J. Glembocki, Fred H. Pollak, J.J. Song,chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, 1987

形態:

vi, 282 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 794 <BA0022700X>

著者名:

• Glembocki, Orest J. <DA05870178>
• Pollak, Fred H. <DA0587019X>
• Song, J. J. <DA0877432X>
• Society of Photo-optical Instrumentation Engineers <DA00848546>
• Metallurgical Society (U.S.) <DA02608725>

ISBN:

9780892528295 [089252829X] (pbk.)

書誌ID:

BA13205462