ISSM 2005 : IEEE International Symposium on Semiconductor Manufacturing : conference proceedings : September 13 - September 15, 2005, San Jose, California | 東京工業大学附属図書館蔵書検索

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ISSM 2005 : IEEE International Symposium on Semiconductor Manufacturing : conference proceedings : September 13 - September 15, 2005, San Jose, California / [sponsored by IEEE Electron Devices Society ...[et al.]]

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図書

出版情報:

Piscataway, N.J. : Institute of Electrical and Electronics Engineers, c2005

形態:

xvi, 498 p. ; 28 cm

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ISBN:

9780780391437 [0780391438]

書誌ID:

BA7661792X

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書誌詳細

ISSN:	1523553X
注記:	"IEEE Catalog Number: 05CH37682"--T.p. verso Includes bibliographical references and index
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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